Thermal conductivity measurements of ultra-thin single crystal silicon layers

W Liu, M Asheghi - 2006 - asmedigitalcollection.asme.org
Self-heating in deep submicron transistors (eg, silicon-on-insulator and strained-Si) and
thermal engineering of many nanoscale devices such as nanocalorimeters and high-density …

Mean free path effects on the experimentally measured thermal conductivity of single-crystal silicon microbridges

TS English, LM Phinney… - Journal of heat …, 2013 - asmedigitalcollection.asme.org
Accurate thermal conductivity values are essential for the successful modeling, design, and
thermal management of microelectromechanical systems (MEMS) and devices. However …

Thermal characterization of thin film Cu interconnects for the next generation of microelectronic devices

S Shojaei-Zadeh, S Zhang, W Liu… - … on Thermal and …, 2004 - ieeexplore.ieee.org
With the dramatic scaling of the transistors, the important issues like RC delay,
electromigration failure and heat dissipation emerge, which need to be addressed urgently …

A low-cost MEMS tester for measuring single nanostructure's thermal conductivity

W Xu, J Li, G Zhang, X Chen, R Galos, H Hadim… - Sensors and Actuators A …, 2013 - Elsevier
A microelectro-mechanical (MEMS) tester that can be used to measure the thermal
conductivity of nanowires and nanostrips has been developed. Error analysis showed our …

A novel technique for in-plane thermal conductivity measurements of electrically conductive interconnects and nanostructures

Y Yang, M Asheghi - … In Electronic Systems (IEEE Cat. No …, 2004 - ieeexplore.ieee.org
Accurate modeling of heat transport in multi-level interconnects of advanced
microprocessors requires accurate knowledge of the thermal properties in thin film …

Thermal Conductivity of Single-Crystal Silicon Microbridges Measured by Electrical Resistance Thermometry and Time-Domain Thermoreflectance

TS English, LM Phinney… - International …, 2012 - asmedigitalcollection.asme.org
Accurate thermal conductivity values are essential to the modeling, design, and thermal
management of microelectromechanical systems (MEMS) and devices. However, the …