New development of atomic layer deposition: processes, methods and applications

PO Oviroh, R Akbarzadeh, D Pan… - … and technology of …, 2019 - Taylor & Francis
Atomic layer deposition (ALD) is an ultra-thin film deposition technique that has found many
applications owing to its distinct abilities. They include uniform deposition of conformal films …

Recent developments in the synthesis of supported catalysts

P Munnik, PE De Jongh, KP De Jong - Chemical reviews, 2015 - ACS Publications
1. INTRODUCTION Heterogeneous catalysis, whereby a gas-or liquid-phase reaction is
performed over a solid catalyst, is at the heart of the modern energy and chemical industries …

Area-selective deposition: fundamentals, applications, and future outlook

GN Parsons, RD Clark - Chemistry of Materials, 2020 - ACS Publications
This review provides an overview of area-selective thin film deposition (ASD) with a primary
focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic …

Catalyst design with atomic layer deposition

BJ O'Neill, DHK Jackson, J Lee, C Canlas, PC Stair… - Acs …, 2015 - ACS Publications
Atomic layer deposition (ALD) has emerged as an interesting tool for the atomically precise
design and synthesis of catalytic materials. Herein, we discuss examples in which the atomic …

Atomic layer deposition—Sequential self-limiting surface reactions for advanced catalyst “bottom-up” synthesis

J Lu, JW Elam, PC Stair - Surface Science Reports, 2016 - Elsevier
Catalyst synthesis with precise control over the structure of catalytic active sites at the atomic
level is of essential importance for the scientific understanding of reaction mechanisms and …

Structural and XPS characterization of ALD Al2O3 coated porous silicon

I Iatsunskyi, M Kempiński, M Jancelewicz, K Załęski… - Vacuum, 2015 - Elsevier
Al 2 O 3 thin films were grown on highly-doped p-Si (100) macro-and mesoporous structures
by atomic layer deposition (ALD) using trimethylaluminum (TMA) and water H 2 O as …

Synthesis and stabilization of supported metal catalysts by atomic layer deposition

J Lu, JW Elam, PC Stair - Accounts of chemical research, 2013 - ACS Publications
Supported metal nanoparticles are among the most important cata-lysts for many practical
reactions, including petroleum refining, automobile exhaust treatment, and Fischer–Tropsch …

[PDF][PDF] Extremely stable platinum nanoparticles encapsulated in a zirconia nanocage by area‐selective atomic layer deposition for the oxygen reduction reaction

N Cheng, MN Banis, J Liu, A Riese, X Li, R Li, S Ye… - Advanced …, 2015 - eng.uwo.ca
DOI: 10.1002/adma. 201404314 amphoteric substance, which reacts with both acids and
bases. To achieve superior control using ALD, area-selective deposition can be done, taking …

Pentacoordinated Al3+‐Stabilized Active Pd Structures on Al2O3‐Coated Palladium Catalysts for Methane Combustion

H Duan, R You, S Xu, Z Li, K Qian… - Angewandte Chemie …, 2019 - Wiley Online Library
Supported Pd catalysts are active in catalyzing the highly exothermic methane combustion
reaction but tend to be deactivated owing to local hyperthermal environments. Herein we …

Toward atomically-precise synthesis of supported bimetallic nanoparticles using atomic layer deposition

J Lu, KB Low, Y Lei, JA Libera, A Nicholls… - Nature …, 2014 - nature.com
Multi-metallic nanoparticles constitute a new class of materials offering the opportunity to
tune the properties via the composition, atomic ordering and size. In particular, supported …