Layer‐engineered functional multilayer thin‐film structures and interfaces through atomic and molecular layer deposition
M Heikkinen, R Ghiyasi… - Advanced Materials …, 2024 - Wiley Online Library
Atomic layer deposition (ALD) technology is one of the cornerstones of the modern
microelectronics industry, where it is exploited in the fabrication of high‐quality inorganic …
microelectronics industry, where it is exploited in the fabrication of high‐quality inorganic …
Maxwell–Wagner Relaxation-Driven High Dielectric Constant in Al2O3/TiO2 Nanolaminates Grown by Pulsed Laser Deposition
Multilayer nanolaminates (NLs) of alternate ultrathin sublayers of Al2O3 and TiO2 (ATA) with
the thickness ranging∼ 2 to 0.5 nm were fabricated by optimized pulsed laser deposition …
the thickness ranging∼ 2 to 0.5 nm were fabricated by optimized pulsed laser deposition …
Alumina–Titania Nanolaminate Condensers for Hot Programmable Catalysis
N anolaminates composed of thin alternating layers of Al2O3 and TiO2 (ATO) were
engineered by using atomic layer deposition as the dielectric material for a Pt-on-carbon …
engineered by using atomic layer deposition as the dielectric material for a Pt-on-carbon …
Process temperature-dependent interface quality and Maxwell–Wagner interfacial polarization in atomic layer deposited Al 2 O 3/TiO 2 nanolaminates for energy …
Considering the excellent tunability of electrical and dielectric properties in binary metal
oxide based multi-layered nanolaminate structures, a thermal atomic layer deposition …
oxide based multi-layered nanolaminate structures, a thermal atomic layer deposition …
Deposition of TiO2/Al2O3 bilayer on hydrogenated diamond for electronic devices: Capacitors, field-effect transistors, and logic inverters
The wide bandgap semiconductor diamond has been studied to develop high-power and
high-frequency electronic devices. Here, high dielectric constant (high-k) TiO 2/Al 2 O 3 …
high-frequency electronic devices. Here, high dielectric constant (high-k) TiO 2/Al 2 O 3 …
Aluminum oxide/titanium dioxide nanolaminates grown by atomic layer deposition: Growth and mechanical properties
OME Ylivaara, L Kilpi, X Liu, S Sintonen, S Ali… - Journal of Vacuum …, 2017 - pubs.aip.org
Atomic layer deposition (ALD) is based on self-limiting surface reactions. This and cyclic
process enable the growth of conformal thin films with precise thickness control and sharp …
process enable the growth of conformal thin films with precise thickness control and sharp …
Small polaron hop** and tunneling transport in Maxwell–Wagner relaxation dominated Al2O3/TiO2 subnanometric laminates
Maxwell–Wagner relaxation dominated Al 2 O 3/TiO 2 nanolaminates (ATA NLs) have
recently demonstrated their potential for high-density energy storage applications. In this …
recently demonstrated their potential for high-density energy storage applications. In this …
Science and technology of integrated super-high dielectric constant AlOx/TiOy nanolaminates/diamond for MOS capacitors and MOSFETs
A super-high dielectric constant AlO x/TiO y nanolaminate film is grown on hydrogenated
diamond (H-diamond) to enable superior metal-oxide-semiconductor (MOS) capacitors and …
diamond (H-diamond) to enable superior metal-oxide-semiconductor (MOS) capacitors and …
Super high-dielectric-constant oxide films for next-generation nanoelectronics and supercapacitors for energy storage
Dielectrics are electrical insulator materials, polarizable by opposite displacement of positive
and negative ionized atoms via electric fields across the material's thickness. Dielectrics are …
and negative ionized atoms via electric fields across the material's thickness. Dielectrics are …
Tunable Nanobattery Effect and Negative Differential Resistance Characteristics in Interfacial Polarization-Dominated Al2O3/TiO2 Nanolaminates
We report insights into the interface carrier-confinement-assisted dielectric and electrical
properties in atomic-layer-deposited Al2O3/TiO2 nanolaminates (NLs). With progressive …
properties in atomic-layer-deposited Al2O3/TiO2 nanolaminates (NLs). With progressive …