Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

This paper presents a miniaturized soft dielectric elastomer actuator (DEA) micropump
which was demonstrated in microfluidic application. A strain-induced pre-stretched DEA …

A soft-landing actuation waveform was designed to reduce the bounce of a single-pole
single-throw (SPST) ohmic radio frequency (RF) microelectromechanical systems (MEMS) …

Though the effect of fringing field in electrostatic parallel-plate actuators is a well-understood
phenomenon, the existing formulations often result in complicated mathematical models …

Microfabricated electrostatic actuators are employed in a wide variety of
microelectromechanical systems (MEMS) for applications ranging from relays and switches …

Typical adaptive optics (AO) applications require continual measurement and correction of
aberrated light and form closed-loop control systems. One of the key components in …

A highly accurate computationally efficient closed-form model has been developed to
determine the pull-in voltage of an electrostatically actuated fixed-fixed beam. The approach …

We present the results of low-and high-temperature measurements, from 5 to 800 K, of the
electrical resistivity and thermoelectric power of polycrystalline and c-axis-oriented textured …

A high capacitive ratio RF MEMS switch, with low-actuation voltage is designed, fabricated
and experimentally validated on high-resistivity silicon (HRS) substrate. Thanks to very good …

Though certain control schemes, such as charge control and capacitive feedback, can
extend the stable travelling range of electrostatically actuated micro-devices to the full gap …