Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications
Self-sustainable sensing systems composed of micro/nano sensors and nano-energy
harvesters contribute significantly to develo** the internet of things (IoT) systems. As one …
harvesters contribute significantly to develo** the internet of things (IoT) systems. As one …
Evolution of micro-nano energy harvesting technology—scavenging energy from diverse sources towards self-sustained micro/nano systems
Facing the energy consumption of a huge number of distributed wireless Internet of Things
(IoT) sensor nodes, scavenging energy from the ambient environment to power these …
(IoT) sensor nodes, scavenging energy from the ambient environment to power these …
Thermoelastic dam** in rectangular micro/nanoplate resonators by considering three-dimensional heat conduction and modified couple stress theory
Thermoelastic dam** (TED) has been confirmed as an intrinsic energy loss and
determines the upper limit of the quality factor of micro/nanoelectromechanical system …
determines the upper limit of the quality factor of micro/nanoelectromechanical system …
Thin-film PMUTs: A review of over 40 years of research
Thin-film PMUTs have been important research topics among microultrasound experts, and
a concise review on their research progress is reported herein. Through rigorous surveying …
a concise review on their research progress is reported herein. Through rigorous surveying …
High-accuracy ultrasonic rangefinders via pMUTs arrays using multi-frequency continuous waves
This paper presents a high accuracy air-coupled reflective ultrasonic rangefinder based on
piezoelectric micromachined ultrasonic transducers (pMUTs) using multi-frequency …
piezoelectric micromachined ultrasonic transducers (pMUTs) using multi-frequency …
Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film
E Shin, HG Yeo, A Yeon, C **, W Park, SC Lee… - Micromachines, 2020 - mdpi.com
This study presents the fabrication and characterization of a piezoelectric micromachined
ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin …
ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin …
Highly accurate airflow volumetric flowmeters via pMUTs arrays based on transit time
This paper describes a highly accurate airflow volumetric flowmeter using piezoelectric
micromachined ultrasonic transducers (pMUTs) arrays based on transit time. Two pieces of …
micromachined ultrasonic transducers (pMUTs) arrays based on transit time. Two pieces of …
Tuning characteristics of AlN-based piezoelectric micromachined ultrasonic transducers using DC bias voltage
In this article, we investigate the effects of dc bias voltage on characteristics for Aluminum
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …
[HTML][HTML] Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices
Piezoelectric micromachined ultrasonic transducers (p-MUTs) have been extensively
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …
Reducing ring-down time of pMUTs with phase shift of driving waveform
This paper proposes a method to reduce ring-down time for piezoelectric micromachined
ultrasonic transducers (pMUTs) through phase shift. The proposed driving form can …
ultrasonic transducers (pMUTs) through phase shift. The proposed driving form can …