Progress in micro/nano sensors and nanoenergy for future AIoT-based smart home applications

A Haroun, X Le, S Gao, B Dong, T He, Z Zhang… - Nano …, 2021 - iopscience.iop.org
Self-sustainable sensing systems composed of micro/nano sensors and nano-energy
harvesters contribute significantly to develo** the internet of things (IoT) systems. As one …

Evolution of micro-nano energy harvesting technology—scavenging energy from diverse sources towards self-sustained micro/nano systems

X Le, X Guo, C Lee - Nanoenergy Advances, 2023 - mdpi.com
Facing the energy consumption of a huge number of distributed wireless Internet of Things
(IoT) sensor nodes, scavenging energy from the ambient environment to power these …

Thermoelastic dam** in rectangular micro/nanoplate resonators by considering three-dimensional heat conduction and modified couple stress theory

L Yang, P Li, Q Gao, T Gao - Journal of Thermal Stresses, 2022 - Taylor & Francis
Thermoelastic dam** (TED) has been confirmed as an intrinsic energy loss and
determines the upper limit of the quality factor of micro/nanoelectromechanical system …

Thin-film PMUTs: A review of over 40 years of research

K Roy, JEY Lee, C Lee - Microsystems & Nanoengineering, 2023 - nature.com
Thin-film PMUTs have been important research topics among microultrasound experts, and
a concise review on their research progress is reported herein. Through rigorous surveying …

High-accuracy ultrasonic rangefinders via pMUTs arrays using multi-frequency continuous waves

X Chen, J Xu, H Chen, H Ding… - Journal of …, 2019 - ieeexplore.ieee.org
This paper presents a high accuracy air-coupled reflective ultrasonic rangefinder based on
piezoelectric micromachined ultrasonic transducers (pMUTs) using multi-frequency …

Development of a high-density piezoelectric micromachined ultrasonic transducer array based on patterned aluminum nitride thin film

E Shin, HG Yeo, A Yeon, C **, W Park, SC Lee… - Micromachines, 2020 - mdpi.com
This study presents the fabrication and characterization of a piezoelectric micromachined
ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin …

Highly accurate airflow volumetric flowmeters via pMUTs arrays based on transit time

X Chen, C Liu, D Yang, X Liu, L Hu… - Journal of …, 2019 - ieeexplore.ieee.org
This paper describes a highly accurate airflow volumetric flowmeter using piezoelectric
micromachined ultrasonic transducers (pMUTs) arrays based on transit time. Two pieces of …

Tuning characteristics of AlN-based piezoelectric micromachined ultrasonic transducers using DC bias voltage

Z Wu, W Liu, Z Tong, Y Cai, C Sun… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, we investigate the effects of dc bias voltage on characteristics for Aluminum
Nitride (AlN)-based piezoelectric micromachined ultrasonic transducers (PMUTs). As dc bias …

[HTML][HTML] Fabrication and characterization of V-doped ZnO films implemented to lead-free piezoelectric micromachined devices

X Zhang, H Wu, Y Zhang, J Luo, T Ye, K Tao… - Journal of …, 2025 - Elsevier
Piezoelectric micromachined ultrasonic transducers (p-MUTs) have been extensively
utilized in medical imaging, range-finding, gesture recognition, and so on. However, the …

Reducing ring-down time of pMUTs with phase shift of driving waveform

X Liu, X Chen, X Le, Y Wang, C Wu, J **e - Sensors and Actuators A …, 2018 - Elsevier
This paper proposes a method to reduce ring-down time for piezoelectric micromachined
ultrasonic transducers (pMUTs) through phase shift. The proposed driving form can …