This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

This review reports an overview and development of micro-gyroscope. The review first
presents different types of micro-gyroscopes. Micro-gyroscopes in this review are …

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental
operational principles of micromachined vibratory rate gyroscopes, and introduces structural …

This paper describes a complementary Kalman filter design to estimate orientation of human
body segments by fusing gyroscope, accelerometer, and magnetometer signals from …

Movement and posture tracking of the human body is of great interest in many different
disciplines such as monitoring of activities of daily living, assessment of working load in …

This paper presents a single-crystal silicon symmetrical and decoupled (SYMDEC)
gyroscope implemented using the dissolved wafer microelectromechanical systems (MEMS) …

This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope
with decoupled oscillation modes. The gyroscope structure allows it to achieve matched …

The limitations of the photolithography-based micromachining technologies defines the
upper-bound on the performance and robustness of micromachined gyroscopes …

We develop a mathematical model of a microgyroscope whose principal component is a
rotating cantilever beam equipped with a proof mass at its end. The microgyroscope …

This paper presents a symmetrical and decoupled surface micromachined gyroscope
fabricated by electroforming thick nickel on a glass substrate. The symmetric structure allows …