The heating of electrons by time-varying fields is fundamental to the operation of radio
frequency (RF) and microwave discharges. Ohmic heating, in which the phase of the …

Radio-frequency discharges are practically and scientifically interesting. A practical
understanding of such discharges requires, among other things, a quantitative appreciation …

In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

An electron heating mechanism based on a resonance between the cyclotron motion of
electrons and the radio frequency sheath oscillations is reported in weakly magnetized …

We report the existence of an enhanced operating regime for a high-frequency, low-
pressure capacitively coupled plasma (CCP) discharge in the presence of a weak magnetic …

The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …

The present work investigates electron transport and heating mechanisms using an (r, z)
particle-in-cell simulation of a typical rf-driven axisymmetric magnetron discharge with a …

Using a particle-in-cell simulation technique, we investigate the plasma and ionization
asymmetry, higher harmonics generation, and electron and ion energy distribution function …

We demonstrate a self-consistent and complete description of electron dynamics in a typical
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …

Plasma asymmetry generation in capacitively coupled plasma (CCP) discharges provides
control over vital parameters that are useful in many plasma processing applications. In this …