Anchor loss improvement in hemispherical resonators with ion beams

Y Ning, C Wang, W Cheng, Z Tian - International Journal of Mechanical …, 2024 - Elsevier
This paper presents a high-precision method for identifying the unbalanced mass of a fused
silica hemispherical resonator and an ion-beam trimming process for removing defective …

Dynamic modelling and quality factor evaluation of hemispherical shell resonators

L Zheng, F Li, Z Wu, S Wen - Journal of Sound and Vibration, 2024 - Elsevier
A novel strategy is proposed for the dynamic modelling and quality factor evaluation of the
hemispherical shell resonators (HSR) considering the coupling of hemispherical shell and …

Vibrations and thermoelastic quality factors of hemispherical shells with fillets

L Zheng, S Wen, G Yi, F Li - Thin-Walled Structures, 2024 - Elsevier
In engineering applications, hemispherical shell resonators are typically machined with
fillets to reduce stress concentration and enhance structure strength. The fillets will inevitably …

A Real-Time Automatic Mode-Matching Method Based on Phase-Shifted Virtual Coriolis Force for MEMS Disk Resonator Gyroscope

J Ren, T Zhou, Y Zhou, Y Li, Y Su - IEEE Sensors Journal, 2023 - ieeexplore.ieee.org
Processing errors can result in an asymmetric stiffness distribution within the micro-
electromechanical systems (MEMS) disk resonator gyroscope (DRG), leading to mode …

Thermoelastic dam** properties in hemi-ellipsoidal shells with variable thickness

L Zheng, S Wen, F Li - Applied Mathematical Modelling, 2025 - Elsevier
Thermoelastic dam** (TED) is a fundamental dissipation mechanism that inevitably exists
in shell resonators with high quality factors. Based on the thermal energy method, this paper …

Direct monitoring of generated particles in plasma enhanced chemical vapor deposition process using temperature compensating quartz crystal microbalance

IR Jang, HU Kim, T Kim, M Kweun, GW Eom… - Sensors and Actuators A …, 2025 - Elsevier
The growing demand for high-density integrated circuits (ICs) necessitates robust
contaminant particle monitoring systems to optimize yield management. This research …

Method for measuring voltages in channels of a hemispherical resonator gyroscope with an arbitrary orientation axes

I Parkhomey, J Boiko, I Zeniv, T Bondarenko - 2023 - elar.khmnu.edu.ua
Анотація The article deals with issues related to solid wave gyroscopes, which are used as
a sensor in inertial navigation systems. The article considers a variant of solving problem …

Effect of Air Dam** on the Vibration Characteristics of Hemispherical Fused Silica Resonators

J Chu, X Liu, C Liu, JG Zhang… - 2022 IEEE 5th …, 2022 - ieeexplore.ieee.org
Hemispherical Resonator Gyroscope (HRG) is a high-precision angle sensor applied in
inertial navigation systems. The quality factor of hemispherical resonator is directly related to …