Acousto-fluidic system assisting in-liquid self-assembly of microcomponents

J Goldowsky, M Mastrangeli… - Journal of …, 2013 - iopscience.iop.org
In this paper, we present the theoretical background, design, fabrication and
characterization of a micromachined chamber assisting the fluidic self-assembly of micro …

[PDF][PDF] Systems and methods for microfluidic mediated self-assembly of hybrid MEMS devices

J Goldowsky - 2013 - research-collection.ethz.ch
Research on hybrid MEMS is gaining momentum. Often incompatible fabrication steps of
functional blocks of MEMS devices give rise to the need for heterogeneous systems …