Voltage‐and Metal‐assisted Chemical Etching of Micro and Nano Structures in Silicon: A Comprehensive Review

S Surdo, G Barillaro - Small, 2024 - Wiley Online Library
Sculpting silicon at the micro and nano scales has been game‐changing to mold bulk silicon
properties and expand, in turn, applications of silicon beyond electronics, namely, in …

[HTML][HTML] Optofluidic biosensing: devices, strategies, and applications

G Testa, G Persichetti, R Bernini - TrAC Trends in Analytical Chemistry, 2024 - Elsevier
Optofluidics is an interdisciplinary domain merging optics and microfluidics and has driven
significant progress in the development of small-scale, high-performance optical biosensors …

High-sensitivity refractive index sensing based on Fano resonances in a photonic crystal cavity-coupled microring resonator

F Peng, Z Wang, G Yuan, L Guan… - IEEE photonics …, 2018 - ieeexplore.ieee.org
Aiming for high-sensitivity refractive index biosensing, we investigate Fano resonance in a
one-dimensional photonic crystal cavity-coupled microring resonator (PCMRR) on a silicon …

Low-cost planar waveguide-based optofluidic sensor for real-time refractive index sensing

D Barshilia, LK Chau, GE Chang - Optics Express, 2020 - opg.optica.org
We report on the design, fabrication, and characterization of mass-producible, sensitive,
intensity-detection-based planar waveguide sensors for rapid refractive index (RI) sensing; …

Gold nanoparticle incorporated inverse opal photonic crystal capillaries for optofluidic surface enhanced Raman spectroscopy

X Zhao, J Xue, Z Mu, Y Huang, M Lu, Z Gu - Biosensors and Bioelectronics, 2015 - Elsevier
Novel transducers are needed for point of care testing (POCT) devices which aim at facile,
sensitive and quick acquisition of health related information. Recent advances in optofluidics …

Catalytic nickel silicide as an alternative to noble metals in metal-assisted chemical etching of silicon

K Kim, S Choi, H Bong, H Lee, M Kim, J Oh - Nanoscale, 2023 - pubs.rsc.org
Metal-assisted chemical etching (MACE) has received much attention from researchers
because it can be used to fabricate plasma-free anisotropic etching profiles for …

Impact of fabrication and bioassay surface roughness on the performance of label-free resonant biosensors based on one-dimensional photonic crystal microcavities

S Surdo, G Barillaro - ACS sensors, 2020 - ACS Publications
Micro-and nanofabrication offer remarkable opportunities for the preparation of label-free
biosensors exploiting optical resonances to improve sensitivity and reduce detection limit …

Ordered silicon pillar arrays prepared by electrochemical micromachining: substrates for high-efficiency cell transfection

FJ Harding, S Surdo, B Delalat, C Cozzi… - … applied materials & …, 2016 - ACS Publications
Ordered arrays of silicon nano-to microscale pillars are used to enable biomolecular
trafficking into primary human cells, consistently demonstrating high transfection efficiency …

Intensity-detection-based guided-mode-resonance optofluidic biosensing system for rapid, low-cost, label-free detection

YC Lin, WH Hsieh, LK Chau, GE Chang - Sensors and Actuators B …, 2017 - Elsevier
We present an intensity-detection-based optofluidic biosensing system with a disposable
guided-mode-resonance (GMR) biosensor chip for low-cost, rapid, label-free biosensing …

High-Q coupled topological edge state in 1D photonic crystal mirror heterostructure for ultrasensitive thermal sensing

Y Bouazzi, MSM Esmail, M Touahmia, A Ahmad… - Optics …, 2025 - Elsevier
This work explores a novel 1D topological photonic crystal (PC) mirror heterostructure for
high-performance thermal sensing. The design leverages a unique coupled topological …