Non-integral model-based scatterometry for CD metrology of single high-aspect-ratio microstructures
WH Chein, FS Yang, ZY Fu… - … Topography: Metrology and …, 2023 - iopscience.iop.org
This article presents an innovative model-based scatterometry method for CD metrology of
single high-aspect-ratio (HAR) microstructures, which are increasingly utilized in advanced …
single high-aspect-ratio (HAR) microstructures, which are increasingly utilized in advanced …
Precise wide-range three-dimensional shape measurement method to measure superfine structures based on speckle interferometry
Y Arai - Optical Engineering, 2020 - spiedigitallibrary.org
With regard to the three-dimensional (3D) shape measurement, based on speckle
interferometry, of an object with a fine structure beyond the diffraction limit of the objective …
interferometry, of an object with a fine structure beyond the diffraction limit of the objective …
Far-field sectioning for the retrieval of subwavelength grating parameters using coherent Fourier scatterometry
L Siaudinyte, SF Pereira - Measurement Science and …, 2020 - iopscience.iop.org
Optical inspection of periodic nanostructures is a major challenge in the semiconductor
industry due to constantly decreasing critical dimensions. In this paper we combine coherent …
industry due to constantly decreasing critical dimensions. In this paper we combine coherent …
Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine
We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm
can be applied to retrieve the phase information of the vectorial scattered field of a …
can be applied to retrieve the phase information of the vectorial scattered field of a …
Refinement strategies for optimal inclusion of prior information in ptychography
P Ansuinelli, WMJM Coene… - Extreme Ultraviolet …, 2020 - spiedigitallibrary.org
The imaging and inspection of extreme ultraviolet (EUV) masks is an important aspect of
EUV lithography. The availability of actinic mask inspection tools able to generate highly …
EUV lithography. The availability of actinic mask inspection tools able to generate highly …