Thin metal film on porous carbon as a medium for electrochemical energy storage

BL Vijayan, II Misnon, C Karuppaiah, GMA Kumar… - Journal of Power …, 2021 - Elsevier
Processing of suitable materials as sustainable, eco-friendly, and cheaper energy storing
electrodes offer significant challenges to overcome the current thresholds. In this work, we …

Cobalt metal ALD: Understanding the mechanism and role of zinc alkyl precursors as reductants for low-resistivity Co thin films

D Zanders, J Liu, J Obenlüneschloß… - Chemistry of …, 2021 - ACS Publications
In this work, we report a new and promising approach toward the atomic layer deposition
(ALD) of metallic Co thin films. Utilizing the simple and known CoCl2 (TMEDA)(TMEDA= N …

Surface zeta potential of ALD-grown metal-oxide films

Z ** on the physical properties of Co3O4 thin films: experimental study and numerical simulation based on the AZO/ZnS/Co3O4:Zn …
Z Barbouch, A El-Habib, J Zimou, M Beraich… - Optical and Quantum …, 2024 - Springer
Thin films of pure and zinc-doped nanostructures have been successfully grown using the
spray pyrolysis technique. Different characterization techniques were used to study the …

Area-selective atomic layer deposition of cobalt oxide to generate patterned cobalt films

Z Zhang, T Dwyer, SM Sirard, JG Ekerdt - Journal of Vacuum Science & …, 2019 - pubs.aip.org
The authors report the area-selective deposition of cobalt (II) oxide on polystyrene-patterned
SiO 2/Si and MgO (001) substrates at 180 C by atomic layer deposition (ALD) using bis (N …

[HTML][HTML] Atomic layer deposition of magnetic thin films: Basic processes, engineering efforts, and road forward

T Jussila, A Philip, T Tripathi, K Nielsch… - Applied Physics …, 2023 - pubs.aip.org
Atomic layer deposition (ALD) is known as a key enabler of the continuous advances in
device engineering for microelectronics. For instance, the state-of-the-art transistor …

Low temperature, area-selective atomic layer deposition of NiO and Ni

HC Nallan, X Yang, BM Coffey… - Journal of Vacuum Science …, 2022 - pubs.aip.org
Nickel and nickel oxide are utilized within various device heterostructures for chemical
sensing, solar cells, batteries, etc. Recently, the rising interest in realizing low-cost, flexible …

Plasma-enhanced atomic layer deposition of cobalt and cobalt nitride: what controls the incorporation of nitrogen?

G van Straaten, R Deckers, MFJ Vos… - The Journal of …, 2020 - ACS Publications
The present study covers the processes that govern the incorporation of nitrogen in the film
during atomic layer deposition (ALD) of cobalt and cobalt nitride prepared from cobaltocene …

Vacuum ultraviolet-enhanced oxidation—A route to the atomic layer etching of palladium metal

BM Coffey, HC Nallan, JR Engstrom, CH Lam… - Chemistry of …, 2020 - ACS Publications
Low-temperature, plasma-free atomic layer etching (ALE) of Pd0 is explored. A vacuum
ultraviolet (VUV) light source (115< λ< 400 nm) is used in conjunction with a controlled O2 …