Metrology robustness based on through-wavelength similarity
MG GRANDA, CM Leewis, F Staals - US Patent 10,871,716, 2020 - Google Patents
(57) ABSTRACT A method including obtaining a measurement result from a target on a
substrate, by using a substrate measurement recipe; determining, by a hardware computer …
substrate, by using a substrate measurement recipe; determining, by a hardware computer …