This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered
considerable attention in areas such as vibration control, sensing, etc. This paper …

This paper reports a high-sensitivity resonant electrometer based on the mode localization
of two degree-of-freedom weakly coupled resonators (WCRs). When charges are applied to …

This paper reviews the development of silicon resonant accelerometers from 1987 to 2022.
For more than 30 years, silicon resonant accelerometers have developed into varieties of …

This paper, for the first time, reports a closedloop accelerometer based on three degree-of-
freedom weakly coupled resonator (WCR). Three resonators are weakly coupled by two …

This paper reports a closed-loop mode-localized accelerometer for the first time. The
accelerometer utilizes weakly coupled single-tine resonators as the sensing element to …

This paper successfully demonstrates the potential of weakly coupled piezoelectric MEMS
(Micro-Electro-Mechanical Systems) gravimetric sensors for the detection of ultra-fine …

This paper presents a new design of microelectromechanical systems (MEMS) based low-g
accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) …

Silicon MEMS resonators are increasingly being adopted for applications in timing and
frequency control, as well as precision sensing. It is well established that a key limitation to …

Highly accurate microelectromechanical-systems inertial sensors have a wide range of
potential applications, including inertial navigation and seismometry. Conventional …