[HTML][HTML] Atomic layer deposition of doped ZnO films

Z Gao, P Banerjee - Journal of Vacuum Science & Technology A, 2019 - pubs.aip.org
This article reviews the process-structure-property relationship in doped ZnO thin films via
atomic layer deposition (ALD). ALD is an important manufacturing-scalable, layer-by-layer …

Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review

AJM Mackus, JR Schneider, C MacIsaac… - Chemistry of …, 2018 - ACS Publications
In the past decade, atomic layer deposition (ALD) has become an important thin film
deposition technique for applications in nanoelectronics, catalysis, and other areas due to its …

Electron tunneling through grain boundaries in transparent conductive oxides and implications for electrical conductivity: the case of ZnO: Al thin films

VH Nguyen, U Gottlieb, A Valla, D Muñoz, D Bellet… - Materials …, 2018 - pubs.rsc.org
In this work, we have applied the Airy Function Transfer-Matrix Method to provide a
numerical description of the charge scattering mechanisms taking place at the grain …

Extraordinarily large permittivity modulation in zinc oxide for dynamic nanophotonics

S Saha, A Dutta, C DeVault, BT Diroll, RD Schaller… - Materials Today, 2021 - Elsevier
The dielectric permittivity of a material encapsulates the essential physics of light-matter
interaction into the material's local response to optical excitation. Photo-induced modulation …

Engineering of optical and electrical properties of electrodeposited highly doped Al: ZnO and In: ZnO for cost-effective photovoltaic device technology

DN Papadimitriou - Micromachines, 2022 - mdpi.com
Resistivity and transparency of zinc-oxide layers (ZnO) for chalcopyrite photovoltaic
technology applications were engineered by activation of the Burstein–Moss (BM) effect at …

Property evaluation of spin coated Al doped ZnO thin films and Au/AZO/FTO Schottky diodes

U Chaitra, AVM Ali, MG Mahesha, A Kompa… - Superlattices and …, 2021 - Elsevier
In the present work, the structural, optical and electrical properties of pristine and aluminium
doped zinc oxide (AZO) thin films deposited on fluorine doped tin oxide (FTO) coated glass …

Atomic layer deposition of ultra-thin and smooth Al-doped ZnO for zero-index photonics

A Anopchenko, S Gurung, L Tao, C Arndt… - Materials Research …, 2018 - iopscience.iop.org
We report fabrication of smooth Al-doped ZnO (AZO) films< 100 nm by atomic layer
deposition (ALD) with epsilon-near-zero (ENZ) frequencies in the near-infrared region …

Increasing the electron mobility of ZnO-based transparent conductive films deposited by open-air methods for enhanced sensing performance

VH Nguyen, D Bellet, B Masenelli… - ACS Applied Nano …, 2018 - ACS Publications
The development of open-air, high-throughput, low-cost thin film fabrication techniques has
immense potential and interest in optoelectronics. However, the oxygen-rich atmosphere …

Enhanced sol–gel route to obtain a highly transparent and conductive aluminum-doped zinc oxide thin film

MH Nateq, R Ceccato - Materials, 2019 - mdpi.com
The electrical and optical properties of sol–gel derived aluminum-doped zinc oxide thin films
containing 2 at.% Al were investigated considering the modifying effects of (1) increasing the …

When ellipsometry works best: A case study with transparent conductive oxides

JA Hillier, S Camelio, W Cranton, AV Nabok… - ACS …, 2020 - ACS Publications
As the library of potential materials with plasmonic behavior in the infrared (IR) grows, we
must carefully assess their suitability for nanophotonic applications. This assessment relies …