Recent advances in the understanding of high-k dielectric materials deposited by atomic layer deposition for dynamic random-access memory capacitor applications

W Jeon - Journal of Materials Research, 2020 - cambridge.org
Capacitors represent the largest obstacle to dynamic random-access memory (DRAM)
technology evolution because the capacitor properties govern the overall operational …

Trilayer tunnel selectors for memristor memory cells

BJ Choi, J Zhang, K Norris, G Gibson… - Advanced Materials …, 2015 - pmc.ncbi.nlm.nih.gov
An integrated memory cell with a memristor and a trilayer crested barrier selector, showing
repeatable nonlinear current–voltage switching loops is presented. The fully atomic‐layer …

High-Temperature Atomic Layer Deposition of Rutile TiO2 Films on RuO2 Substrates: Interfacial Reactions and Dielectric Performance

J Jeon, T Kim, M Jang, HK Chung, SC Kim… - Chemistry of …, 2024 - ACS Publications
Capacitor structures utilized in modern dynamic random access memory (DRAM) cells
require the conformal growth of high-k films on electrode materials. In this context, the atomic …

Atomic Layer Growth of Rutile TiO2 Films with Ultrahigh Dielectric Constants via Crystal Orientation Engineering

T Kim, J Jeon, SH Ryu, HK Chung, M Jang… - … Applied Materials & …, 2024 - ACS Publications
In general, the electronic and optical properties of oxide films can significantly benefit from
highly textured crystallinity. However, oxide films grown by atomic layer deposition (ALD), a …

Stacked One‐Selector‐One‐Resistive Memory Crossbar Array With High Nonlinearity and On‐Current Density for the Neuromorphic Applications

HC Woo, J Kim, S Lee, HJ Kim… - Advanced Electronic …, 2022 - Wiley Online Library
A crossbar array using resistive switching random‐access memory requires a selector
device to prevent leakage current. However, the high current flow during the electroforming …

Structure and Electrical Properties of Al-Doped HfO2 and ZrO2 Films Grown via Atomic Layer Deposition on Mo Electrodes

YW Yoo, W Jeon, W Lee, CH An, SK Kim… - … applied materials & …, 2014 - ACS Publications
The effects of Al do** in atomic-layer-deposited HfO2 (AHO) and ZrO2 (AZO) films on the
evolutions of their crystallographic phases, grain sizes, and electric properties, such as their …

Controlling the crystallinity of HfO2 thin film using the surface energy-driven phase stabilization and template effect

AJ Lee, BS Kim, JH Hwang, Y Kim, H Oh, YJ Park… - Applied Surface …, 2022 - Elsevier
Phase transition of HfO 2 thin film has been investigated to demonstrate desirable electrical
properties, such as high dielectric constant or ferroelectricity, however, the most of results …

Y-doped HfO2 deposited by atomic layer deposition using a cocktail precursor for DRAM capacitor dielectric application

J Kim, BS Kim, AJ Lee, DH Han, JH Hwang, Y Kim… - Ceramics …, 2022 - Elsevier
A Y-doped HfO 2 thin film deposited using a cocktail precursor for a DRAM capacitor
dielectric application was investigated. It has been difficult to adapt HfO 2, a potential high …

Reliable high work-function molybdenum dioxide synthesis via template-effect-utilizing atomic layer deposition for next-generation electrode applications

YW Kim, AJ Lee, DH Han, DC Lee, JH Hwang… - Journal of Materials …, 2022 - pubs.rsc.org
MoO2, a conductive metal oxide, has attracted considerable attention as an electrode
material in metal–insulator–metal (MIM) capacitors owing to its crystallinity and high work …

The role of surface O-vacancies in the photocatalytic oxidation of Methylene Blue by Zn-doped TiO2: a mechanistic approach

RG Nair, S Mazumdar, B Modak, R Bapat… - … of Photochemistry and …, 2017 - Elsevier
The nano-sized Ti 1− x Zn x O 2 system (0.01≤ x≤ 1.0) was synthesized by the sol-gel
route. A combination of techniques such as X-ray diffraction, electron microscopy, vibrational …