A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

Amplitude amplification can improve signal-to-noise ratio, which is of great significance in
engineering systems, especially in small-scale MEMS systems. Hesre, we report an …

We report a new gas sensing technique based on the simultaneous tracking of multiple
modes of vibration of an electrothermally heated bridge resonator operated near the …

We investigate experimentally and analytically the effect of initial shapes, arc and cosine
wave, on the static and dynamic behavior of microelectromechanical systems (MEMS) arch …

Exploiting nonlinear characteristics in micro/nanosystems has been a subject of increasing
interest in the last decade. Among others, vigorous intermodal coupling through internal …

We investigate experimentally and theoretically the two-to-one internal resonance between
the first two symmetric vibrational modes of a micromachined arch resonator, which is …

The nonlinear vibration of cantilever nickel microbeams with thickness in micron level is
investigated through experiment and theory. A non-contact dynamic vibration measurement …

We experimentally demonstrate a miniature highly sensitive wide-range resonant magnetic
Lorentz-force micro-sensor. The concept is demonstrated based on the detection of the …

We investigate experimentally and theoretically mode crossing and mode veering between
the first two symmetric and anti-symmetric modes of an electrothermally and electrostatically …

The ability to measure pressure and temperature using a MEMS sensor constitutes a major
interest for several engineering applications. In this paper, we present a method and system …