Pulsed high-density plasmas for advanced dry etching processes

S Banna, A Agarwal, G Cunge, M Darnon… - Journal of Vacuum …, 2012 - pubs.aip.org
Plasma etching processes at the 22 nm technology node and below will have to satisfy
multiple stringent scaling requirements of microelectronics fabrication. To satisfy these …

Radiation effects in advanced multiple gate and silicon-on-insulator transistors

E Simoen, M Gaillardin, P Paillet… - … on Nuclear Science, 2013 - ieeexplore.ieee.org
The aim of this review paper is to describe in a comprehensive manner the current
understanding of the radiation response of state-of-the-art Silicon-on-Insulator (SOI) and …

Strained Si and SiGe nanowire tunnel FETs for logic and analog applications

QT Zhao, S Richter, C Schulte-Braucks… - IEEE Journal of the …, 2015 - ieeexplore.ieee.org
Guided by the Wentzel-Kramers–Brillouin approximation for band-to-band tunneling (BTBT),
various performance boosters for Si TFETs are presented and experimentally verified. Along …

SiGe channel technology: Superior reliability toward ultrathin EOT devices—Part I: NBTI

J Franco, B Kaczer, PJ Roussel, J Mitard… - … on Electron Devices, 2012 - ieeexplore.ieee.org
We report extensive experimental results of the negative bias temperature instability (NBTI)
reliability of SiGe channel pMOSFETs as a function of the main gate-stack parameters. The …

A robust and write bit-line free sub-threshold 12T-SRAM for ultra low power applications in 14 nm FinFET technology

M Karamimanesh, E Abiri, K Hassanli, MR Salehi… - Microelectronics …, 2021 - Elsevier
In this paper, a robust 12T-SRAM memory cell at sub-threshold voltage is designed to
reduce power consumption for low power applications, that in addition to reducing power …

Total-Ionizing-Dose Effects and Low-Frequency Noise in 30-nm Gate-Length Bulk and SOI FinFETs With SiO2/HfO2 Gate Dielectrics

M Gorchichko, Y Cao, EX Zhang, D Yan… - … on Nuclear Science, 2019 - ieeexplore.ieee.org
Total-ionizing-dose (TID) effects and low-frequency noise are evaluated in 30-nm gate-
length bulk and silicon-on-insulator (SOI) FinFETs for devices with fin widths of 10-40 nm …

Device and circuit exploration of multi-nanosheet transistor for sub-3 nm technology node

Y Seon, J Chang, C Yoo, J Jeon - Electronics, 2021 - mdpi.com
A multi-nanosheet field-effect transistor (mNS-FET) device was developed to maximize gate
controllability while making the channel in the form of a sheet. The mNS-FET has superior …

Impact of single charged gate oxide defects on the performance and scaling of nanoscaled FETs

J Franco, B Kaczer, M Toledano-Luque… - 2012 IEEE …, 2012 - ieeexplore.ieee.org
We report extensive statistical NBTI reliability measurements of nanoscaled FETs of different
technologies, based on which we propose a 1/area scaling rule for the statistical impact of …

A write bit-line free sub-threshold SRAM cell with fully half-select free feature and high reliability for ultra-low power applications

M Karamimanesh, E Abiri, K Hassanli… - … -International Journal of …, 2022 - Elsevier
In this paper, a robust sub-threshold 13 T-SRAM cell is designed, which in addition to
reducing power and energy consumption can show high reliability and have the least error …

Laser-and heavy ion-induced charge collection in bulk FinFETs

F El-Mamouni, EX Zhang, ND Pate… - … on Nuclear Science, 2011 - ieeexplore.ieee.org
Through-wafer two-photon absorption laser experiments were performed on bulk FinFETs.
Transients show distinct signatures for charge collection from drift and diffusion …