This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

This work, for the first time, presents a platform for designing microelectromechanical system
(MEMS) capacitive transducers featuring multiple transduction gaps implemented by a …

This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator
based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop …

Resonant body transistors (RBTs) are solid state, actively sensed microelectromechanical
systems (MEMS) resonators that can be implemented in commercial CMOS technologies …

We wish to illuminate the analogous link between microfluidic-based devices, and the
already established pairing of micromechanics and microelectronics to create a …

A novel complimentary metal-oxide-semiconductor-microelectormechanical systems (CMOS-
MEMS) composite ring resonator capable of a dual-mode operation has been proposed to …

Integrated CMOS-MEMS clamped-clamped beam resonators using metal wet etching
technique are demonstrated with passive temperature compensation through the use of SiO …

The CMOS-MEMS mechanically coupled filters fabricated using a mature CMOS-MEMS
platform together with simple post-CMOS release processes are proposed in this work for …

The Part II of this paper presents the numerical model and experimental validations of the
CMOS-MEMS resonant transducers fabricated by a reliable TiN-composite (TiN-C) platform …