Relieving the stress or strain associated with volume change is highly desirable for high‐
performance SiOx anodes in terms of stable solid electrolyte interphase (SEI)‐film growth …

In this study, the silicon dioxide was deposited on the silicon substrate by metal-organic
based plasma enhanced chemical vapor deposition (PECVD) method at the low …

Thin SiOxCyHz films have been prepared by plasma enhanced chemical vapor deposition
(PECVD) on silicon substrates at low pressure (2 mTorr) and 300 W rf power, using …

Several applications of PIC simulations for understanding basic physics phenomena in low‐
temperature plasmas are presented: capacitive radiofrequency discharges in Oxygen, dusty …

In this series of three papers we present results from a combined experimental and
theoretical, particle-based study to quantitatively describe capacitively coupled radio …

The industrial utilization of methane to methanol is based on the indirect pathway with
syngas as an intermediate product, but the reaction conditions are very harsh and the costs …

Silicone-like coatings were prepared by plasma enhanced chemical vapor deposition on
steel substrates using a hexamethyldisiloxane–oxygen (80∶ 20) precursor mixture, in a …

Abstract TiO 2 nanoparticles (NPs), 3 nm in size, were injected inside a very-low-pressure O
2 plasma reactor using a liquid injector and following an iterative injection sequence …

Ti x Si 1-x O 2 thin films appear as promising materials to replace SiO 2 for DRAM devices.
For the effective down scaling, these mixed oxides should combine the best properties from …

Recently a so-called electrical asymmetry effect (EAE), which could achieve high-degree
separate control of ion flux and energy in dual-frequency capacitively coupled radio …