Titanium-based ohmic contacts in advanced CMOS technology

S Mao, J Luo - Journal of Physics D: Applied Physics, 2019 - iopscience.iop.org
Since the contact resistance characterized by a specific contact resistivity (ρ c) in the
source/drain (S/D) regions is becoming a bottleneck for further improving device …

Component identification and defect detection in transmission lines based on deep learning

X Zheng, R Jia, L Gong, G Zhang… - Journal of Intelligent & …, 2021 - content.iospress.com
Ensuring the stable and safe operation of the power system is an important work of the
national power grid companies. The power grid company has established a special power …

[HTML][HTML] Review of electrical contacts to phase change materials and an unexpected trend between metal work function and contact resistance to germanium telluride

KA Cooley, HM Aldosari, K Yang… - Journal of Vacuum …, 2020 - pubs.aip.org
Devices based on the unique phase transitions of phase change materials (PCMs) like
GeTe and Ge 2 Sb 2 Te 5 (GST) require low-resistance and thermally stable Ohmic contacts …

1.5× 10− 9 Ωcm2 Contact resistivity on highly doped Si: P using Ge pre-amorphization and Ti silicidation

H Yu, M Schaekers, E Rosseel, A Peter… - 2015 IEEE …, 2015 - ieeexplore.ieee.org
Record-low contact resistivity (pc) for n-Si, down to 1.5× 10− 9 Q-cm2, is achieved on Si: P
epitaxial layer. We confirm that Ti silicidation reduces the pc for n-Si, while an additional Ge …

Ge CMOS gate stack and contact development for vertically stacked lateral nanowire FETs

MJH Van Dal, G Vellianitis, G Doornbos… - 2018 IEEE …, 2018 - ieeexplore.ieee.org
We present (i) a novel, thermally stable Atomic Layer Deposition (ALD) high-k dielectric
stack that, for the first time, has the potential to meet all gate stack requirements for both n …

Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching Ohm-cm2

H Yu, M Schaekers, A Peter, G Pourtois… - … on Electron Devices, 2016 - ieeexplore.ieee.org
In recent CMOS technology, extreme shrinking of contact area at source/drain regions raises
serious concerns of high metal/semiconductor contact resistance. Confronting this problem …

Selective epitaxial growth of high-P Si: P for source/drain formation in advanced Si nFETs

E Rosseel, SK Dhayalan, AY Hikavyy, R Loo… - ECS …, 2016 - iopscience.iop.org
As contact resistance becomes a bottle-neck in scaled CMOS devices, there is a need for
source/drain epitaxy with maximum dopant concentrations and optimized contacting …

Thermal Stability Concern of Metal-Insulator-Semiconductor Contact: A Case Study of Ti/TiO2/n-Si Contact

H Yu, M Schaekers, T Schram… - … on Electron Devices, 2016 - ieeexplore.ieee.org
This work discusses the thermal stability of metal-insulator-semiconductor (MIS) contacts. A
case study is performed on a typical low-Schottky barrier height (qφb) MIS contact: Ti/TiO 2/n …

A Novel Strategy for Extracting Richer Semantic Information Based on Fault Detection in Power Transmission Lines

S Yan, J Li, J Wang, G Liu, A Ai, R Liu - Entropy, 2023 - mdpi.com
With the development of the smart grid, the traditional defect detection methods in
transmission lines are gradually shifted to the combination of robots or drones and deep …

Contact resistivities of metal-insulator-semiconductor contacts and metal-semiconductor contacts

H Yu, M Schaekers, K Barla, N Horiguchi… - Applied Physics …, 2016 - pubs.aip.org
Applying simulations and experiments, this paper systematically compares contact
resistivities (ρ c) of metal-insulator-semiconductor (MIS) contacts and metal-semiconductor …