Titanium-based ohmic contacts in advanced CMOS technology
S Mao, J Luo - Journal of Physics D: Applied Physics, 2019 - iopscience.iop.org
Since the contact resistance characterized by a specific contact resistivity (ρ c) in the
source/drain (S/D) regions is becoming a bottleneck for further improving device …
source/drain (S/D) regions is becoming a bottleneck for further improving device …
Component identification and defect detection in transmission lines based on deep learning
X Zheng, R Jia, L Gong, G Zhang… - Journal of Intelligent & …, 2021 - content.iospress.com
Ensuring the stable and safe operation of the power system is an important work of the
national power grid companies. The power grid company has established a special power …
national power grid companies. The power grid company has established a special power …
[HTML][HTML] Review of electrical contacts to phase change materials and an unexpected trend between metal work function and contact resistance to germanium telluride
Devices based on the unique phase transitions of phase change materials (PCMs) like
GeTe and Ge 2 Sb 2 Te 5 (GST) require low-resistance and thermally stable Ohmic contacts …
GeTe and Ge 2 Sb 2 Te 5 (GST) require low-resistance and thermally stable Ohmic contacts …
1.5× 10− 9 Ωcm2 Contact resistivity on highly doped Si: P using Ge pre-amorphization and Ti silicidation
H Yu, M Schaekers, E Rosseel, A Peter… - 2015 IEEE …, 2015 - ieeexplore.ieee.org
Record-low contact resistivity (pc) for n-Si, down to 1.5× 10− 9 Q-cm2, is achieved on Si: P
epitaxial layer. We confirm that Ti silicidation reduces the pc for n-Si, while an additional Ge …
epitaxial layer. We confirm that Ti silicidation reduces the pc for n-Si, while an additional Ge …
Ge CMOS gate stack and contact development for vertically stacked lateral nanowire FETs
We present (i) a novel, thermally stable Atomic Layer Deposition (ALD) high-k dielectric
stack that, for the first time, has the potential to meet all gate stack requirements for both n …
stack that, for the first time, has the potential to meet all gate stack requirements for both n …
Titanium Silicide on Si:P With Precontact Amorphization Implantation Treatment: Contact Resistivity Approaching Ohm-cm2
In recent CMOS technology, extreme shrinking of contact area at source/drain regions raises
serious concerns of high metal/semiconductor contact resistance. Confronting this problem …
serious concerns of high metal/semiconductor contact resistance. Confronting this problem …
Selective epitaxial growth of high-P Si: P for source/drain formation in advanced Si nFETs
As contact resistance becomes a bottle-neck in scaled CMOS devices, there is a need for
source/drain epitaxy with maximum dopant concentrations and optimized contacting …
source/drain epitaxy with maximum dopant concentrations and optimized contacting …
Thermal Stability Concern of Metal-Insulator-Semiconductor Contact: A Case Study of Ti/TiO2/n-Si Contact
H Yu, M Schaekers, T Schram… - … on Electron Devices, 2016 - ieeexplore.ieee.org
This work discusses the thermal stability of metal-insulator-semiconductor (MIS) contacts. A
case study is performed on a typical low-Schottky barrier height (qφb) MIS contact: Ti/TiO 2/n …
case study is performed on a typical low-Schottky barrier height (qφb) MIS contact: Ti/TiO 2/n …
A Novel Strategy for Extracting Richer Semantic Information Based on Fault Detection in Power Transmission Lines
S Yan, J Li, J Wang, G Liu, A Ai, R Liu - Entropy, 2023 - mdpi.com
With the development of the smart grid, the traditional defect detection methods in
transmission lines are gradually shifted to the combination of robots or drones and deep …
transmission lines are gradually shifted to the combination of robots or drones and deep …
Contact resistivities of metal-insulator-semiconductor contacts and metal-semiconductor contacts
H Yu, M Schaekers, K Barla, N Horiguchi… - Applied Physics …, 2016 - pubs.aip.org
Applying simulations and experiments, this paper systematically compares contact
resistivities (ρ c) of metal-insulator-semiconductor (MIS) contacts and metal-semiconductor …
resistivities (ρ c) of metal-insulator-semiconductor (MIS) contacts and metal-semiconductor …