Single-electron transistor: review in perspective of theory, modelling, design and fabrication

R Patel, Y Agrawal, R Parekh - Microsystem Technologies, 2021 - Springer
Integrated circuit (IC) technology has grown tremendously over the last few decades. The
prime goal has been to achieve low-power and high-performance in logic and memory …

Fabrication of single-electron transistors using field-emission-induced electromigration

W Kume, Y Tomoda, M Hanada… - Journal of Nanoscience …, 2010 - ingentaconnect.com
Fabrication of Single-Electron Transistors Using Field-Emission-Induced Electromigration
Page 1 IP: 5.10.31.211 On: Mon, 10 Jul 2023 19:38:20 Copyright: American Scientific …

Room Temperature Single-Electron Transistor Featuring Gate-Enhanced on -State Current

A Beaumont, C Dubuc, J Beauvais… - IEEE electron device …, 2009 - ieeexplore.ieee.org
A single-electron transistor operating at room temperature was successfully fabricated by an
improved nanodamascene process. It consists in a gated titanium nanowire interspersed by …

Simulation and design methodology for hybrid SET-CMOS integrated logic at 22-nm room-temperature operation

R Parekh, A Beaumont, J Beauvais… - IEEE transactions on …, 2012 - ieeexplore.ieee.org
Single-electron transistor (SET) circuits can be stacked above the CMOS platform to achieve
functional and heterogeneous 3-D integration of nanoelectronic devices. For SET-CMOS …

Spectroscopic ellipsometry on thin titanium oxide layers grown on titanium by plasma oxidation

G Droulers, A Beaumont, J Beauvais… - Journal of Vacuum …, 2011 - pubs.aip.org
Electronic devices based on tunnel junctions require tools able to accurately control the
thickness of thin metal and oxide layers on the order of the nanometer. This article shows …

SET logic driving capability and its enhancement in 3-D integrated SET–CMOS circuit

R Parekh, J Beauvais, D Drouin - Microelectronics Journal, 2014 - Elsevier
The driving capability of a single-electron transistor (SET) circuit is sensitive to the load and
interconnects. We discuss about improving the performance of a SET logic in hybrid SET …

SiO2 shallow nanostructures ICP etching using ZEP electroresist

M Guilmain, A Jaouad, S Ecoffey, D Drouin - Microelectronic Engineering, 2011 - Elsevier
We propose an inductively coupled plasma (ICP) process to etch nanometer scale patterns
defined by electron beam lithography in ZEP520A. The nanoscale patterns have been …

Inductively coupled plasma etching of amorphous silicon nanostructures over nanotopography using C4F8/SF6 chemistry

P Harvey-Collard, A Jaouad, D Drouin… - Microelectronic …, 2013 - Elsevier
Abstract Inductively Coupled Plasma (ICP) etching of amorphous silicon (a-Si)
nanostructures using a continuous C 4 F 8/SF 6 plasma over nanotopography in silicon …

Current conduction models in the high temperature single-electron transistor

C Dubuc, A Beaumont, J Beauvais, D Drouin - Solid-State Electronics, 2009 - Elsevier
Single-electron transistor drain current is studied as a function of the temperature. A current
conduction model based on the physical properties of the tunnel junctions is proposed to …

A damascene platform for controlled ultra-thin nanowire fabrication

M Guilmain, T Labbaye, F Dellenbach… - …, 2013 - iopscience.iop.org
This paper presents a damascene process for the fabrication of titanium
micro/nanostructures and nanowires with adjustable thickness down to 2 nm. Their depth is …