Kinetics of deposition of Cu thin films in supercritical carbon dioxide solutions from a F-free copper (II) β-diketone complex

M Matsubara, M Hirose, K Tamai… - Journal of the …, 2009 - iopscience.iop.org
Kinetics of deposition of Cu thin films in supercritical carbon dioxide solutions from copper
bis (di-isobutyrylmethanate),), a F-free copper (II) complex, via hydrogen reduction were …

Suitability of metallic materials for constructing metal-coated dielectric terahertz waveguides

Y Huang, K Konishi, M Deura, Y Shimoyama… - Journal of Applied …, 2022 - pubs.aip.org
We aimed to identify metallic materials that could be used to construct metal-coated
dielectric terahertz (THz) waveguides. We examined seven different metals: gold (Au) …

Development of a model for evaluating propagation loss of metal-coated dielectric terahertz waveguides

Y Huang, K Konishi, M Deura, Y Shimoyama… - Journal of Applied …, 2021 - pubs.aip.org
A simple physical model for evaluating propagation loss of a metal-coated dielectric
terahertz (THz) waveguide with different metal film thicknesses was developed for those …

Phase behavior of carbon dioxide/tetrapropyl orthosilicate and tetrabutyl orthosilicate systems

H Matsukawa, K Otake - Fluid Phase Equilibria, 2021 - Elsevier
Alkyl groups of tetraalkoxysilane have different chain lengths, which results in different
reactivity of the sol–gel reaction. Hence, it is essential to understand the phase behavior for …

Solubility of titanium diisopropoxide bis (dipivaloylmethanate) complex in supercritical carbon dioxide and its effect on supercritical fluid deposition process

H Uchida, K Sekino, Y Hayakawa, S Koda - The Journal of Supercritical …, 2012 - Elsevier
The solubility of a titanium (Ti) complex, titanium diisopropoxide bis (dipivaloylmethanate)[Ti
(Oi-Pr) 2 (dpm) 2], in supercritical carbon dioxide (scCO2) fluid was measured under various …

Fabrication of high aspect ratio NiP nanowires from blind-hole AAO templates by sc-CO2 electroless plating

HC Chuang, TS Chang, J Sanchez - Materials Letters, 2019 - Elsevier
Abstract 1D NiP nanowires were prepared by sc-CO 2 electroless plating (SC-ELP) from
blind-hole via AAO templates. Aspect ratio limitations of conventional and SC-ELP were …

Ultra-conformal metal coating on high-aspect-ratio three-dimensional structures using supercritical fluid: controlled selectivity/non-selectivity

T Momose, T Uejima, H Yamada… - Japanese Journal of …, 2012 - iopscience.iop.org
Underlayer dependence can be controlled for supercritical fluid deposition (SCFD) of Cu.
SCFD, which has a remarkable potential for ultra-conformal deposition and gap-filling, has …

In-situ spectroscopic ellipsometry of the Cu deposition process from supercritical fluids: evidence of an abnormal surface layer formation

T Sasaki, Y Tamegai, T Ueno… - Japanese Journal of …, 2012 - iopscience.iop.org
In this paper, we report in-situ spectroscopic ellipsometry of Cu deposition from supercritical
carbon dioxide fluids. The motivations of this work were 1) to perform a detailed observation …

Step coverage quality of Cu films by supercritical fluid deposition compared with chemical vapor deposition

T Momose, M Sugiyama, E Kondoh… - Japanese Journal of …, 2010 - iopscience.iop.org
Feasibility of step coverage (SC) by supercritical fluid deposition (SCFD) of Cu was
evaluated using a finite element method (FEM) simulation with experimentally estimated …

Supercritical chemical fluid deposition of InP and InAs

G Aksomaityte, F Cheng, AL Hector, JR Hyde… - Chemistry of …, 2010 - ACS Publications
Supercritical chemical fluid deposition (SCFD) from [n Bu2In (μ-E t Bu2) 2In n Bu2]
precursors (E= P or As) dissolved in a homogeneous hexane/CO2 fluid results in the growth …