This paper presents a MEMS capacitive accelerometer with fully symmetrical double-sided
H-shaped beam structure. The fully symmetrical structure is fabricated from a single double …

Electrochemical discharge machining (ECDM) process is a recent non-traditional machining
technique used for structuring insulating materials like glass and ceramic substrates. In this …

Microfluidics is an emerging field giving rise to a number of scientific developments with
wide applications in proteomics, genomics, DNA analysis, drug delivery systems and lab-on …

In the present study, a detailed experimental investigation is carried out on a constant
velocity-feed drilling technique of an electrochemical discharge machining (ECDM) process …

Electro chemical discharge hybrid machining process involves in micro-machining to cut
micro-channel, micro-profile as well as micro-slot, blind hole on hard materials like ceramic …

Piezoresistive acceleration sensors have found a wide range of applications for the last four
decades. However, in recent times, high performance piezoresistive acceleration sensors …

This paper presents design, fabrication and testing of a quad beam silicon piezoresistive Z-
axis accelerometer with very low cross-axis sensitivity. The accelerometer device proposed …

In this study, a comb-type capacitive accelerometer based on a silicon carbide (SiC)
microstructure is presented and investigated by the finite element method (FEM). It has the …

Abstract During past decades Micro Electro Mechanical Systems (MEMS) have been
developed and presented in the market. It is important to find new processes and methods to …

This Letter presents simulation, fabrication and testing of a high-performance quad-beam
silicon piezoresistive accelerometer with very low cross-axis sensitivity. Cross-axis …