Recent advances in the plasma-assisted synthesis of silicon-based thin films and nanostructures

P Mandracci, P Rivolo - Coatings, 2023 - mdpi.com
Silicon-based thin films and nanostructures are of paramount importance in a wide range of
applications, including microelectronics, photovoltaics, large area sensors, and biomedicine …

Determination of the oxygen content in amorphous SiOx thin films

AO Zamchiy, EA Baranov, IE Merkulova… - Journal of Non …, 2019 - Elsevier
The bonding structure and composition of amorphous silicon suboxide (a-SiO x, 0.25< x<
0.75) thin films deposited by gas-jet electron beam plasma chemical vapor deposition were …

Experimental study of pool boiling on heaters with nanomodified surfaces under saturation

S Khmel, E Baranov, V Vladimirov… - Heat Transfer …, 2022 - Taylor & Francis
A technology has been developed for the synthesis of arrays of oriented microropes and
cocoon-like microstructures consisting of silicon oxide nanowires on a copper substrate with …

Synthesis of silicon oxide nanowires by the GJ EBP CVD method using different diluent gases

SY Khmel, EA Baranov, AV Zaikovskii… - … status solidi (a), 2016 - Wiley Online Library
Nanowires of silicon oxide SiOx (x≤ 2) were synthesized from a mixture of monosilane and
hydrogen (helium, argon) by gas‐jet electron beam plasma chemical vapor deposition (GJ …

Tunable high reflective bands to improve quantum dot white light-emitting diodes

ZH Chen, L Liang, Y Wang, N Qiao, J Gao… - Journal of Materials …, 2017 - pubs.rsc.org
Quantum dot (QD) light emitting diodes (LEDs), whose narrow emission bandwidth can be
tuned by changing the type and size of the QDs, show pure and saturated colors, and thus …

Structural and optical properties of a‐SiOx:H thin films deposited by the GJ EBP CVD method

E Baranov, S Khmel, A Zamchiy… - physica status solidi …, 2016 - Wiley Online Library
In this work, hydrogenated amorphous silicon suboxide (a‐SiOx: H) thin films have been
prepared by gas‐jet electron beam plasma chemical vapor deposition method (GJ EBP …

Enhancing the brightness of quantum dot light-emitting diodes by multilayer heterostructures

N Qiao, ZH Chen, YB Yang, SD Liu… - IEEE Photonics …, 2016 - ieeexplore.ieee.org
Quantum dots (QDs) show great promise for use in nanotechnology, owing to their high
quantum efficiency, color tenability, narrow emission, and high luminescence efficiency. As a …

Influence of substrate temperature on the morphology of silicon oxide nanowires synthesized using a tin catalyst

SY Khmel, EA Baranov, AO Zamchiy… - … status solidi (a), 2016 - Wiley Online Library
Silicon oxide nanowires SiOx were synthesized by the gas‐jet electron beam plasma
chemical vapor deposition method. The synthesis of nanostructures was carried out on …

Tin-catalyzed oriented array of microropes of silicon oxide nanowires synthesized on different substrates

AO Zamchiy, EA Baranov, SY Khmel - Vacuum, 2018 - Elsevier
Silicon oxide (SiO x) nanowires were synthesized from a monosilane–argon–hydrogen
mixture on substrates of different materials (monocrystalline silicon (c-Si), glass, stainless …

Synthesis of a-SiO x : H thin films by the gas-jet electron beam plasma chemical vapor deposition method

EA Baranov, AO Zamchiy, SY Khmel - Technical Physics Letters, 2015 - Springer
Thin a-SiO x: H films have been synthesized for the first time by the gas-jet electron beam
plasma chemical vapor deposition method. As the substrate temperature increased from …