[HTML][HTML] The influence of hydrogen on the chemical, mechanical, optical/electronic, and electrical transport properties of amorphous hydrogenated boron carbide
Because of its high electrical resistivity, low dielectric constant (κ), high thermal neutron
capture cross section, and robust chemical, thermal, and mechanical properties, amorphous …
capture cross section, and robust chemical, thermal, and mechanical properties, amorphous …
Evolution of a-Si: H to nc-Si: H transition of hydrogenated silicon films deposited by trichlorosilane using principle component analysis of optical emission …
SH Wang, HE Chang, CC Lee, YK Fuh, TT Li - Materials Chemistry and …, 2020 - Elsevier
Abstract Plasma Enhanced Chemical Vapor Deposition (PECVD) has been used for direct
production of wafer-equivalent quality silicon thin film solar cells, includes the nc-Si: H …
production of wafer-equivalent quality silicon thin film solar cells, includes the nc-Si: H …
Optimal H2-dilution playing key role in accomplishing significant nanocrystallinity with both Si and Ge moieties in SiGe nanocomposite thin film network
Accomplishing significant nanocrystallinity in SiGe alloy network during low-temperature
growth in RF-PECVD is a challenging task because it involves grossly different …
growth in RF-PECVD is a challenging task because it involves grossly different …
In situ plasma monitoring of PECVD nc-Si: H films and the influence of dilution ratio on structural evolution
YL Hsieh, LH Kau, HJ Huang, CC Lee, YK Fuh, TT Li - Coatings, 2018 - mdpi.com
We report plasma-enhanced chemical vapor deposition (PECVD) hydrogenated nano-
crystalline silicon (nc-Si: H) thin films. In particular, the effect of hydrogen dilution ratio (R …
crystalline silicon (nc-Si: H) thin films. In particular, the effect of hydrogen dilution ratio (R …
Si-rich a-Si1− xCx thin films by dc magnetron co-sputtering of silicon and silicon carbide: Structural and optical properties
Si-rich hydrogenated amorphous silicon carbide (a-Si1− xCx: H) thin films with different
carbon fractions were elaborated by a dc magnetron sputtering system. Their structural and …
carbon fractions were elaborated by a dc magnetron sputtering system. Their structural and …
Low-temperature growth of amorphous silicon films and direct fabrication of solar cells on flexible polyimide and photo-paper substrates
Direct deposition of hydrogenated amorphous silicon (a-Si: H) thin films and fabrication of
solar cells on polyimide (PI) and photo-paper (PP) substrates using a rf-plasma-enhanced …
solar cells on polyimide (PI) and photo-paper (PP) substrates using a rf-plasma-enhanced …
Structural and optical properties of nc-Si: H thin films deposited by layer-by-layer technique
Hydrogenated nanocrystalline silicon (nc-Si: H) thin films deposited on c-Si and quartz
substrates by layer-by-layer (LBL) technique using radio-frequency plasma enhanced …
substrates by layer-by-layer (LBL) technique using radio-frequency plasma enhanced …
Study on nanocrystalline silicon thin films grown by the filtered cathodic vacuum arc technique using boron doped solid silicon for fast photo detectors
This paper reports the synthesis and properties of as grown and hydrogenated
nanocrystalline silicon (nc-Si or nc-Si: H) thin films deposited by the filtered cathodic vacuum …
nanocrystalline silicon (nc-Si or nc-Si: H) thin films deposited by the filtered cathodic vacuum …
Aerosol assisted atmospheric pressure chemical vapor deposition of silicon thin films using liquid cyclic hydrosilanes
Silicon (Si) thin films were produced using an aerosol assisted atmospheric pressure
chemical vapor deposition technique with liquid hydrosilane precursors cyclopentasilane …
chemical vapor deposition technique with liquid hydrosilane precursors cyclopentasilane …
Development of a novel fluorinated n-nc-SiO: H material for solar cell application
In this paper we report the development of fluorinated nanocrystalline SiO: F: H materials
prepared by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, the …
prepared by Plasma Enhanced Chemical Vapour Deposition (PECVD) technique, the …