Electrostatic pull-in instability in MEMS/NEMS: A review
WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …
On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel …
This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …
Nanometer-sized water bridge and pull-off force in AFM at different relative humidities: Reproducibility measurement and model based on surface tension change
This article deals with the analysis of the relationship between the pull-off force measured by
atomic force microscopy and the dimensions of water bridge condensed between a …
atomic force microscopy and the dimensions of water bridge condensed between a …
Calculation of normal contact forces between silica nanospheres
In this work, interaction forces between two silica nanospheres after contact, including the
van der Waals (vdW) attraction, Born repulsion, and mechanical contact forces are studied …
van der Waals (vdW) attraction, Born repulsion, and mechanical contact forces are studied …
Temperature-dependent capillary forces at nano-contacts for estimating the heat conduction through a water meniscus
A Assy, S Gomès - Nanotechnology, 2015 - iopscience.iop.org
The temperature dependence of the capillary forces at nano-sized contacts is investigated.
Two different resistive scanning thermal microscopy (SThM) nanoprobes are used in this …
Two different resistive scanning thermal microscopy (SThM) nanoprobes are used in this …
Migration of adhesive material in electrostatically actuated MEMS switch
IV Uvarov - Microelectronics Reliability, 2021 - Elsevier
Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …
including radio frequency and microwave systems, logic devices, acceleration sensing and …
Propensity and geometrical distribution of surface nanobubbles: effect of electrolyte, roughness, pH, and substrate bias
M Mazumder, B Bhushan - Soft Matter, 2011 - pubs.rsc.org
Nanobubbles are believed to have surface charges at the gas–liquid interface. However, the
effect of various factors on the formation mechanism and stability of these charged species is …
effect of various factors on the formation mechanism and stability of these charged species is …
Experimental investigation into stiction forces and dynamic mechanical anti-stiction solutions in ultra-clean encapsulated MEMS devices
A systematic experimental and theoretical evaluation of stiction between intermittently
contacting silicon surfaces in an ultra-clean encapsulation process is presented, evaluating …
contacting silicon surfaces in an ultra-clean encapsulation process is presented, evaluating …
Towards 3D charge localization by a method derived from atomic force microscopy: the electrostatic force distance curve
Charges injection and accumulation in the dielectric remains a critical issue, mainly because
these phenomena are involved in a great number of failure mechanisms in cables or …
these phenomena are involved in a great number of failure mechanisms in cables or …
Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric …
In this study, two different characterization techniques based on Kelvin probe force
microscopy (KPFM) have been used to investigate the dielectric and substrate charging in …
microscopy (KPFM) have been used to investigate the dielectric and substrate charging in …