Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel …

U Zaghloul, G Papaioannou, B Bhushan… - Microelectronics …, 2011 - Elsevier
This paper reviews the state of the art knowledge related to critical failure mechanisms in
electrostatic micro-and nano-electromechanical systems (MEMS and NEMS) which are the …

Nanometer-sized water bridge and pull-off force in AFM at different relative humidities: Reproducibility measurement and model based on surface tension change

M Bartošík, L Kormoš, L Flajšman… - The Journal of …, 2017 - ACS Publications
This article deals with the analysis of the relationship between the pull-off force measured by
atomic force microscopy and the dimensions of water bridge condensed between a …

Calculation of normal contact forces between silica nanospheres

W Sun, Q Zeng, A Yu, K Kendall - Langmuir, 2013 - ACS Publications
In this work, interaction forces between two silica nanospheres after contact, including the
van der Waals (vdW) attraction, Born repulsion, and mechanical contact forces are studied …

Temperature-dependent capillary forces at nano-contacts for estimating the heat conduction through a water meniscus

A Assy, S Gomès - Nanotechnology, 2015 - iopscience.iop.org
The temperature dependence of the capillary forces at nano-sized contacts is investigated.
Two different resistive scanning thermal microscopy (SThM) nanoprobes are used in this …

Migration of adhesive material in electrostatically actuated MEMS switch

IV Uvarov - Microelectronics Reliability, 2021 - Elsevier
Microelectromechanical systems (MEMS) switches are attractive for many applications
including radio frequency and microwave systems, logic devices, acceleration sensing and …

Propensity and geometrical distribution of surface nanobubbles: effect of electrolyte, roughness, pH, and substrate bias

M Mazumder, B Bhushan - Soft Matter, 2011 - pubs.rsc.org
Nanobubbles are believed to have surface charges at the gas–liquid interface. However, the
effect of various factors on the formation mechanism and stability of these charged species is …

Experimental investigation into stiction forces and dynamic mechanical anti-stiction solutions in ultra-clean encapsulated MEMS devices

DB Heinz, VA Hong, CH Ahn, EJ Ng… - Journal of …, 2016 - ieeexplore.ieee.org
A systematic experimental and theoretical evaluation of stiction between intermittently
contacting silicon surfaces in an ultra-clean encapsulation process is presented, evaluating …

Towards 3D charge localization by a method derived from atomic force microscopy: the electrostatic force distance curve

C Villeneuve-Faure, L Boudou… - Journal of Physics D …, 2014 - iopscience.iop.org
Charges injection and accumulation in the dielectric remains a critical issue, mainly because
these phenomena are involved in a great number of failure mechanisms in cables or …

Kelvin probe force microscopy-based characterization techniques applied for electrostatic MEMS/NEMS devices and bare dielectric films to investigate the dielectric …

U Zaghloul, B Bhushan, F Coccetti, P Pons… - Journal of Vacuum …, 2011 - pubs.aip.org
In this study, two different characterization techniques based on Kelvin probe force
microscopy (KPFM) have been used to investigate the dielectric and substrate charging in …