High-K materials and metal gates for CMOS applications

J Robertson, RM Wallace - Materials Science and Engineering: R: Reports, 2015 - Elsevier
The scaling of complementary metal oxide semiconductor (CMOS) transistors has led to the
silicon dioxide layer used as a gate dielectric becoming so thin that the gate leakage current …

Ultimate scaling of high-κ gate dielectrics: Higher-κ or interfacial layer scavenging?

T Ando - Materials, 2012 - mdpi.com
Current status and challenges of aggressive equivalent-oxide-thickness (EOT) scaling of
high-κ gate dielectrics via higher-κ (> 20) materials and interfacial layer (IL) scavenging …

High Current Density in Monolayer MoS2 Doped by AlOx

CJ McClellan, E Yalon, KKH Smithe, SV Suryavanshi… - ACS …, 2021 - ACS Publications
Semiconductors require stable do** for applications in transistors, optoelectronics, and
thermoelectrics. However, this has been challenging for two-dimensional (2D) materials …

Two-dimensional transistors with reconfigurable polarities for secure circuits

P Wu, D Reis, XS Hu, J Appenzeller - NATURE electronics, 2021 - nature.com
Security is a critical aspect in modern circuit design, but research into hardware security at
the device level is rare as it requires modification of existing technology nodes. With the …

Band offsets, Schottky barrier heights, and their effects on electronic devices

J Robertson - Journal of Vacuum Science & Technology A, 2013 - pubs.aip.org
The authors review the band line-ups and band offsets between semiconductors, dielectrics,
and metals, including the theory, experimental data, and the chemical trends. Band offsets …

Origin of electric dipoles formed at high-k/SiO2 interface

K Kita, A Toriumi - Applied Physics Letters, 2009 - pubs.aip.org
A model for the physical origin of the dipole formed at high-k/SiO 2 interface is proposed. In
our model, an areal density difference of oxygen atoms at high-k/SiO 2 interface is …

Integrations and challenges of novel high-k gate stacks in advanced CMOS technology

G He, L Zhu, Z Sun, Q Wan, L Zhang - Progress in Materials Science, 2011 - Elsevier
Due to the limitations in conventional complementary metal–oxide–semiconductor (CMOS)
scaling technology in recent years, innovation in transistor structures and integration of …

Gate oxides beyond SiO2

DG Schlom, S Guha, S Datta - MRS bulletin, 2008 - cambridge.org
This year marks a major materials milestone in the makeup of silicon-based field-effect
transistors: in the microprocessors produced by leading manufacturers, the SiO2 gate …

Complete band offset characterization of the HfO2/SiO2/Si stack using charge corrected x-ray photoelectron spectroscopy

E Bersch, M Di, S Consiglio, RD Clark… - Journal of Applied …, 2010 - pubs.aip.org
The HfO 2–Si valence and conduction band offsets (VBO and CBO, respectively) of
technologically relevant HfO 2/SiO 2/Si film stacks have been measured by several methods …

Atomic mechanism of electric dipole formed at high-K: SiO2 interface

L Lin, J Robertson - Journal of Applied Physics, 2011 - pubs.aip.org
The mechanism of flat-band voltage shifts in La-and Al-based, etc., oxide cap** layers in
high-K (dielectric constant) metal gate stacks is investigated by ab initio calculations on …