Recent advances in mems-based 3d hemispherical resonator gyroscope (hrg)—a sensor of choice

AR Ranji, V Damodaran, K Li, Z Chen, S Alirezaee… - Micromachines, 2022 - mdpi.com
Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision
motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical …

High quality full ablation cutting and stealth dicing of silica glass using picosecond laser Bessel beam with burst mode

K Liao, W Wang, X Mei, B Liu - Ceramics International, 2022 - Elsevier
Glass cutting is widely used in many fields, such as aerospace and integrated electronics.
To meet requirements of high-quality glass cutting, methods of full ablation cutting and …

Fused silica micro shell resonator with T-shape masses for gyroscopic application

D **ao, W Li, Z Hou, K Lu, Y Shi… - Journal of …, 2017 - ieeexplore.ieee.org
This paper presents a novel micro shell resonator (MSR) with T-shape masses based on
fused silica using out-of-plane electrode structures. Eight circular-distributed T-shape …

Geometric imperfection characterization and precise assembly of micro shell resonators

Y Shi, K Lu, X **, Y Wu, D **ao… - Journal of …, 2020 - ieeexplore.ieee.org
Micro glassblowing can be utilized in the fabrication of high-precision micro shell resonator
due to its acceptable cost and promising performance. Geometric imperfection …

Design and fabrication of high-Q birdbath resonator for MEMS gyroscopes

S Singh, T Nagourney, JY Cho… - 2018 IEEE/ION …, 2018 - ieeexplore.ieee.org
We present the design, fabrication, and measurement results of an axisymmetric 3D micro-
shell resonator called the birdbath resonator. Three classes of birdbath resonators are …

Analysis and compensation of bias drift of force-to-rebalanced micro-hemispherical resonator gyroscope caused by assembly eccentricity error

Z Ruan, X Ding, Y Gao, Z Qin… - Journal of …, 2022 - ieeexplore.ieee.org
Aiming at the excitation coupling error caused by assembly eccentricity error in micro-
hemispherical resonator gyroscope (HRG), this paper proposes a method to identify …

A novel high transduction efficiency micro shell resonator gyroscope with 16 T-shape masses using out-of-plane electrodes

W Li, X **, K Lu, Y Shi, Z Hou, Y Wu, X Wu… - IEEE Sensors …, 2019 - ieeexplore.ieee.org
A novel micro shell resonator gyroscope (MSRG) with 16 T-shape masses using out-of-
plane electrodes is proposed in this paper. The T-shape masses are designed for high …

Axial multi-focus stealth cutting method based on the fractional Fourier transform for quartz glass

M Jiang, S Sun, J Wang, F Zhang, X Wang, J Shao… - Ceramics …, 2023 - Elsevier
Aiming at the problems of quality defects, low efficiency, and insufficient flexibility in the
traditional glass cutting process, this paper proposes a holographic ultrafast laser axial multi …

Microfabricated optically-pumped magnetometers

R Jiménez-Martínez, S Knappe - High Sensitivity Magnetometers, 2017 - Springer
Optical magnetometers (OPMs), implemented by optical interrogation of alkali-atoms
contained in a vapor cell, are among the most sensitive detectors for magnetic fields. Due to …

Identification and Trimming of the Eccentric Mass in Shell Resonators

Y Chen, K Zeng, X **, K Lu, Y Shi, D **ao… - International Journal of …, 2024 - Elsevier
This paper presents a novel method to identify and suppress the undesired spurious mode
caused by the 1st and 3rd harmonics of eccentric mass defects in shell resonators. This …