A review of phased array steering for narrow-band electrooptical systems
Nonmechanical steering of optical beams will enable revolutionary systems with random
access pointing, similar to microwave radar phased arrays. An early approach was …
access pointing, similar to microwave radar phased arrays. An early approach was …
A review of micromirror arrays
The aim of this paper is to provide a review of micromirror array (MMA) technologies (2631
MMA research papers and patents were reviewed for this effort). The performance …
MMA research papers and patents were reviewed for this effort). The performance …
Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability
We present micromirrors actuated by self-aligned, high aspect ratio, vertical electrostatic
combdrives with multi-level electrical isolation that allows bi-directional and dual-mode …
combdrives with multi-level electrical isolation that allows bi-directional and dual-mode …
An electrothermal tip–tilt–piston micromirror based on folded dual S-shaped bimorphs
K Jia, S Pal, H **e - Journal of Microelectromechanical systems, 2009 - ieeexplore.ieee.org
This paper presents the design, optimization, fabrication, and test results of an
electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The …
electrothermally actuated tip-tilt-piston micromirror with a large optical aperture of 1 mm. The …
MEMS gratings and their applications
G Zhou, ZH Lim, Y Qi, FS Chau… - International Journal of …, 2021 - Taylor & Francis
Grating plays an essential role in various optical systems owing to its unique dispersion
properties. In recent years, there is increasing demand to miniaturize optical systems for a …
properties. In recent years, there is increasing demand to miniaturize optical systems for a …
[LIVRE][B] Mems/Nems:(1) Handbook techniques and applications design methods,(2) Fabrication techniques,(3) manufacturing methods,(4) Sensors and actuators,(5) …
CT Leondes - 2007 - books.google.com
As miniaturization, batch fabrication, and integrated electronics rapidly enable the
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating …
Optical phased array using high contrast gratings for two dimensional beamforming and beamsteering
We have developed a microelectromechanical system (MEMS) optical phased array
incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and …
incorporating a high-index-contrast subwavelength grating (HCG) for beamforming and …
Tunable metasurfaces via subwavelength phase shifters with uniform amplitude
Metasurfaces with tunable spatial phase functions could benefit numerous applications.
Currently, most approaches to tuning rely on mechanical stretching which cannot control …
Currently, most approaches to tuning rely on mechanical stretching which cannot control …
High speed optical phased array using high contrast grating all-pass filters
We report a high speed 8x8 optical phased array using tunable 1550 nm all-pass filters with
ultrathin high contrast gratings (HCGs) as the microelectromechanical-actuated top …
ultrathin high contrast gratings (HCGs) as the microelectromechanical-actuated top …
Multilevel beam SOI-MEMS fabrication and applications
V Milanovic - Journal of Microelectromechanical Systems, 2004 - ieeexplore.ieee.org
A microfabrication technology has been developed and demonstrated, which enhances the
capabilities and applications of high aspect ratio silicon-on-insulator …
capabilities and applications of high aspect ratio silicon-on-insulator …