CMOS scaling for the 5 nm node and beyond: Device, process and technology

HH Radamson, Y Miao, Z Zhou, Z Wu, Z Kong, J Gao… - Nanomaterials, 2024 - mdpi.com
After more than five decades, Moore's Law for transistors is approaching the end of the
international technology roadmap of semiconductors (ITRS). The fate of complementary …

22nm FDSOI technology for emerging mobile, Internet-of-Things, and RF applications

R Carter, J Mazurier, L Pirro, JU Sachse… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
22FDX™ is the industry's first FDSOI technology architected to meet the requirements of
emerging mobile, Internet-of-Things (IoT), and RF applications. This platform achieves the …

Fully depleted SOI (FDSOI) technology

K Cheng, A Khakifirooz - Science China Information Sciences, 2016 - Springer
Fully depleted SOI (FDSOI) has become a viable technology not only for continued CMOS
scaling to 22 nm node and beyond but also for improving the performances of legacy …

Scaling challenges for advanced CMOS devices

AP Jacob, R **e, MG Sung, L Liebmann… - … Journal of High …, 2017 - World Scientific
The economic health of the semiconductor industry requires substantial scaling of chip
power, performance, and area with every new technology node that is ramped into …

Cryogenic characterization of 22-nm FDSOI CMOS technology for quantum computing ICs

S Bonen, U Alakusu, Y Duan, MJ Gong… - IEEE Electron …, 2018 - ieeexplore.ieee.org
An approach is proposed to realize large-scale,“high-temperature” and high-fidelity quantum
computing integrated circuits based on single-and multiple-coupled quantum-dot electron …

Characterization and modeling of quantum dot behavior in FDSOI devices

SP Tripathi, S Bonen, A Bharadwaj… - IEEE Journal of the …, 2022 - ieeexplore.ieee.org
A compact analytical model is proposed along with a parameter extraction methodology to
accurately capture the steady-state (DC) sequential tunneling current observed in the …

Detection of sub-design rule physical defects using E-beam inspection

OD Patterson, J Lee, DM Salvador… - IEEE Transactions on …, 2013 - ieeexplore.ieee.org
E-beam inspection provides an alternative approach to brightfield inspection for detection of
otherwise difficult to detect physical defects. Advantages of E-beam inspection include …

Harnessing the unique features of FDSOI CMOS technology in fibreoptic, millimetre-wave, and quantum computing circuits from 2 K to 400 K

S Bonen, MS Dadash, A Zandieh, U Alakuşu… - Solid-State …, 2022 - Elsevier
Starting with the full characterization of the n-and p-MOSFETs in a 22-nm FDSOI CMOS
process from DC and S-parameter measurements over temperature in the 2 K to 400 K …

SOI technologies for RF and millimeter-wave applications

M Rack, JP Raskin - Convergence of More Moore, More than …, 2021 - taylorfrancis.com
This chapter presents an overview of silicon-on-insulator (SOI) technology for radio-
frequency (RF) and millimeter-wave telecommunication applications. The SOI technology …

Nanosheet with single epitaxial stack forming off-set dual material channels for gate-all-around CMOS

X Miao, J Zhang, A Reznicek, CH Lee - US Patent 10,593,673, 2020 - Google Patents
(57) ABSTRACT A semiconductor structure is provided in which an nFET nanosheet stack of
suspended silicon channel material nanosheets is present in an nFET device region and a …