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CMOS scaling for the 5 nm node and beyond: Device, process and technology
HH Radamson, Y Miao, Z Zhou, Z Wu, Z Kong, J Gao… - Nanomaterials, 2024 - mdpi.com
After more than five decades, Moore's Law for transistors is approaching the end of the
international technology roadmap of semiconductors (ITRS). The fate of complementary …
international technology roadmap of semiconductors (ITRS). The fate of complementary …
22nm FDSOI technology for emerging mobile, Internet-of-Things, and RF applications
R Carter, J Mazurier, L Pirro, JU Sachse… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
22FDX™ is the industry's first FDSOI technology architected to meet the requirements of
emerging mobile, Internet-of-Things (IoT), and RF applications. This platform achieves the …
emerging mobile, Internet-of-Things (IoT), and RF applications. This platform achieves the …
Fully depleted SOI (FDSOI) technology
K Cheng, A Khakifirooz - Science China Information Sciences, 2016 - Springer
Fully depleted SOI (FDSOI) has become a viable technology not only for continued CMOS
scaling to 22 nm node and beyond but also for improving the performances of legacy …
scaling to 22 nm node and beyond but also for improving the performances of legacy …
Scaling challenges for advanced CMOS devices
The economic health of the semiconductor industry requires substantial scaling of chip
power, performance, and area with every new technology node that is ramped into …
power, performance, and area with every new technology node that is ramped into …
Cryogenic characterization of 22-nm FDSOI CMOS technology for quantum computing ICs
An approach is proposed to realize large-scale,“high-temperature” and high-fidelity quantum
computing integrated circuits based on single-and multiple-coupled quantum-dot electron …
computing integrated circuits based on single-and multiple-coupled quantum-dot electron …
Characterization and modeling of quantum dot behavior in FDSOI devices
A compact analytical model is proposed along with a parameter extraction methodology to
accurately capture the steady-state (DC) sequential tunneling current observed in the …
accurately capture the steady-state (DC) sequential tunneling current observed in the …
Detection of sub-design rule physical defects using E-beam inspection
OD Patterson, J Lee, DM Salvador… - IEEE Transactions on …, 2013 - ieeexplore.ieee.org
E-beam inspection provides an alternative approach to brightfield inspection for detection of
otherwise difficult to detect physical defects. Advantages of E-beam inspection include …
otherwise difficult to detect physical defects. Advantages of E-beam inspection include …
Harnessing the unique features of FDSOI CMOS technology in fibreoptic, millimetre-wave, and quantum computing circuits from 2 K to 400 K
Starting with the full characterization of the n-and p-MOSFETs in a 22-nm FDSOI CMOS
process from DC and S-parameter measurements over temperature in the 2 K to 400 K …
process from DC and S-parameter measurements over temperature in the 2 K to 400 K …
SOI technologies for RF and millimeter-wave applications
This chapter presents an overview of silicon-on-insulator (SOI) technology for radio-
frequency (RF) and millimeter-wave telecommunication applications. The SOI technology …
frequency (RF) and millimeter-wave telecommunication applications. The SOI technology …
Nanosheet with single epitaxial stack forming off-set dual material channels for gate-all-around CMOS
(57) ABSTRACT A semiconductor structure is provided in which an nFET nanosheet stack of
suspended silicon channel material nanosheets is present in an nFET device region and a …
suspended silicon channel material nanosheets is present in an nFET device region and a …