Resonator devices, filter devices, and methods of fabrication are disclosed. A resonator
device includes a substrate and a single-crystal piezoelectric plate having front and back …

Filter devices and methods are disclosed. A filter device includes a substrate having a
surface. A back surface of a single-crystal piezoelectric plate is attached to the surface of the …

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having front and back …

Acoustic resonator devices and filters are disclosed. An acoustic resonator device includes a
substrate having a surface, wherein the surface comprises an etched cavity, and a single …

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a trap-rich region adjacent to a surface and a single-crystal piezoelectric …

Methods of fabricating acoustic resonators are disclosed. A back surface of a piezoelectric
plate is bonded to a surface of a substrate. Thickness measurements are made at a plurality …

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a
substrate having a surface and a single-crystal piezoelectric plate having parallel front and …

Band N77 bandpass filters include a first plurality of transversely-excited film bulk acoustic
resonators (XBARs) on a first chip comprising a first rotated YX-cut lithium niobate …

An acoustic resonator device with low thermal impedance has a substrate and a single-
crystal piezoelectric plate having a back surface attached to a top surface of the substrate via …

There are disclosed acoustic resonators and methods of fabricating acoustic resonators. An
acoustic resonator includes a piezoelectric plate having front and back surfaces, the back …