An acceleration transducer, or accelerometer, is a sensor typically utilized for measuring
acceleration forces. These forces may be static, like the constant force of gravity, or they can …

Provisional application No. 61/506,526, filed on Jul.(57) 11, 2011. A microelectromechanical
system (MEMS) device that reduces or eliminates Stiction includes a Substrate and a mov …

An embodiment is a method for forming a microelectrome chanical system (MEMS) device.
The method comprises forming a MEMS structure over a first substrate, wherein the MEMS …

2011-01-27 Assigned to QUALCOMM MEMS TECHNOLOGIES, INC. reassignment
QUALCOMM MEMS TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST …

BACKGROUND A touchpad is a pointing device that may be used, like a computer mouse,
to provide an interface to an electronic device. A touchpad is a specialized control Surface …

BACKGROUND Sensor devices which have a number of sensor substrates having different
sensor structures for detecting various char acteristics are being increasingly used in various …

(57) ABSTRACT A dynamic quantity sensor includes a force receiving portion, a first
movable portion that rotates in a first rotational direc tion around a first rotational axis …

(57) ABSTRACT A micromechanical yaw-rate sensor comprising a first yaw rate sensor
element, which outputs a first sensor signal, which contains information about a rotation …

US9903718B2 - MEMS device mechanical amplitude control - Google Patents
US9903718B2 - MEMS device mechanical amplitude control - Google Patents MEMS …

2011-02-04 Assigned to QUALCOMM MEMS TECHNOLOGIES, INC. reassignment
QUALCOMM MEMS TECHNOLOGIES, INC. ASSIGNMENT OF ASSIGNORS INTEREST …