Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate

C Besleaga, GE Stan, AC Galca, L Ion, S Antohe - Applied surface science, 2012 - Elsevier
Transparent ZnO films are synthesized by RF-magnetron sputtering (1.78 MHz) onto glass
substrates, using a mild-pressed ZnO powder target. The depositions were carried at three …

Influence of a tailored oxide interface on the quality factor of microelectromechanical resonators

DD Lynes, H Chandrahalim - Advanced Materials Interfaces, 2023 - Wiley Online Library
Piezoelectric microelectromechanical systems (MEMS) are used as sensors, actuators,
energy harvesters, accelerometers, and communication modules. Aluminum nitride (AlN) is …

Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators

DD Lynes, J Young, E Lang… - Advanced Materials …, 2023 - Wiley Online Library
Microelectromechanical systems (MEMS) resonators use is widespread, from electronic
filters and oscillators to physical sensors such as accelerometers and gyroscopes. These …

Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing

DD Lynes, H Chandrahalim - 2024 IEEE SENSORS, 2024 - ieeexplore.ieee.org
Microelectromechanical systems (MEMS) resonators are ideal for low-power, compact, and
cost-effective sensing due to their small size and low power consumption. In this study, dual …

Modeling the Effects of Radiation on Microelectromechanical Resonators

DD Lynes - 2023 - scholar.afit.edu
As the use of MEMS becomes more prolific in air, space, defense, and power applications,
they will be exposed to more extreme radiation environments. This dissertation explores the …