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Double layer structure of ZnO thin films deposited by RF-magnetron sputtering on glass substrate
Transparent ZnO films are synthesized by RF-magnetron sputtering (1.78 MHz) onto glass
substrates, using a mild-pressed ZnO powder target. The depositions were carried at three …
substrates, using a mild-pressed ZnO powder target. The depositions were carried at three …
Influence of a tailored oxide interface on the quality factor of microelectromechanical resonators
DD Lynes, H Chandrahalim - Advanced Materials Interfaces, 2023 - Wiley Online Library
Piezoelectric microelectromechanical systems (MEMS) are used as sensors, actuators,
energy harvesters, accelerometers, and communication modules. Aluminum nitride (AlN) is …
energy harvesters, accelerometers, and communication modules. Aluminum nitride (AlN) is …
Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators
DD Lynes, J Young, E Lang… - Advanced Materials …, 2023 - Wiley Online Library
Microelectromechanical systems (MEMS) resonators use is widespread, from electronic
filters and oscillators to physical sensors such as accelerometers and gyroscopes. These …
filters and oscillators to physical sensors such as accelerometers and gyroscopes. These …
Self-Referencing MEMS Resonator with Dual Mechanical Modes for Temperature-Independent Environmental Sensing
DD Lynes, H Chandrahalim - 2024 IEEE SENSORS, 2024 - ieeexplore.ieee.org
Microelectromechanical systems (MEMS) resonators are ideal for low-power, compact, and
cost-effective sensing due to their small size and low power consumption. In this study, dual …
cost-effective sensing due to their small size and low power consumption. In this study, dual …
Modeling the Effects of Radiation on Microelectromechanical Resonators
DD Lynes - 2023 - scholar.afit.edu
As the use of MEMS becomes more prolific in air, space, defense, and power applications,
they will be exposed to more extreme radiation environments. This dissertation explores the …
they will be exposed to more extreme radiation environments. This dissertation explores the …