A design method of comb-drive actuators for linear tuning characteristics in mechanically tunable optical filters

D Hah - Microsystem Technologies, 2017 - Springer
A new method is proposed in design of comb-drive actuators for specific voltage-
displacement characteristics with finger gaps as the design parameters. The design method …

C-band optical filters with micromechanical tuning

D Hah - Microsystem Technologies, 2018 - Springer
Tunable optical filters that cover the entire range of the C-band (1530–565 nm) are designed
by utilizing the Vernier effect, ie series coupling of microring resonators of different sizes …

Architectures for evanescent frequency tuning of microring resonators in micro-opto-electro-mechanical SOI platforms

H Shoman, MS Dahlem - Silicon Photonics X, 2015 - spiedigitallibrary.org
Microring resonators are important elements in a wide variety of optical systems, ranging
from optical switches and tunable filterbanks to optical sensors. In these structures, the …

Cantilever Design for Tunable WDM Filters Based on Silicon Microring Resonators

H Shoman, MS Dahlem - 3D Stacked Chips: From Emerging Processes to …, 2016 - Springer
Wavelength-division multiplexing (WDM) systems are essential building blocks in modern
photonic integrated circuits (PICs), and could enable high-bandwidth connectivity in novel …

Design of wide-band tunable optical filters with cascaded microring resonators and shaped-finger comb-drive actuators

D Hah - 2016 Symposium on Design, Test, Integration and …, 2016 - ieeexplore.ieee.org
Utilizing the Vernier effect, series coupling of multiple microring resonators with different
sizes is used to design a wide-band (free spectral range: 36 nm) tunable filter. For index …