Metal organic vapour phase epitaxy of AlN, GaN, InN and their alloys: A key chemical technology for advanced device applications

IM Watson - Coordination Chemistry Reviews, 2013 - Elsevier
This article reviews metal organic vapour phase epitaxy (MOVPE) processes developed for
the group 13 nitrides AlN, GaN, InN and their alloys. The binaries are direct-gap …

Advances and prospects in Ga2O3/GaN heterojunctions: From fabrication to high-performance devices

K Xu, R Wang, Y Wang, J Wang, T Zhi, G Yang… - Materials Science in …, 2025 - Elsevier
Abstract Gallium oxide (Ga 2 O 3) and gallium nitride (GaN) are fourth-and third-generation
semiconductor materials, respectively. Their heterogeneous structure (lattice mismatch of …

New approaches for calculating absolute surface energies of wurtzite (0001)/(0001): A study of ZnO and GaN

J Zhang, Y Zhang, K Tse, B Deng, H Xu… - Journal of Applied …, 2016 - pubs.aip.org
The accurate absolute surface energies of (0001)/(000 1⁠) surfaces of wurtzite structures
are crucial in determining the thin film growth mode of important energy materials. However …

Hydrogen-surfactant-assisted coherent growth of GaN on ZnO substrate

J Zhang, Y Zhang, K Tse, J Zhu - Physical Review Materials, 2018 - APS
Heterostructures of wurtzite based devices have attracted great research interest because of
the tremendous success of GaN in light emitting diodes (LED) industry. High-quality GaN …

MOCVD growth of GaN on Si (1 1 1) substrates using an ALD-grown Al2O3 interlayer

WE Fenwick, N Li, T Xu, A Melton, S Wang, H Yu… - Journal of crystal …, 2009 - Elsevier
GaN thin films have been grown on Si (111) substrates using an atomic layer deposition
(ALD)-grown Al2O3 interlayer. This thin Al2O3 layer reduces strain in the subsequent GaN …

MOCVD growth of GaN on sapphire using a Ga2O3 interlayer

TY Tsai, SL Ou, MT Hung, DS Wuu… - Journal of The …, 2011 - iopscience.iop.org
Metalorganic chemical vapor deposition (MOCVD) was used to grow crystalline GaN on a
Ga 2 O 3 interlayer deposited by pulsed laser deposition. The Ga 2 O 3 interlayer situated …

InGaN LED fabricated on Eco-GaN template with a Ga2O3 sacrificial layer for chemical lift-off application

HH Hsueh, SL Ou, DS Wuu, RH Horng - Vacuum, 2015 - Elsevier
In this study, a nitride light-emitting diode (LED) with an electroplated Cu substrate was
detached from a GaN/sapphire (Eco-GaN) template by chemical lift-off (CLO) using a Ga 2 O …

New CVD-based method for the growth of high-quality crystalline zinc oxide layers

F Huber, M Madel, A Reiser, S Bauer, K Thonke - Journal of Crystal Growth, 2016 - Elsevier
High-quality zinc oxide (ZnO) layers were grown using a new chemical vapour deposition
(CVD)-based low-cost growth method. The process is characterized by total simplicity, high …

Chemical lift‐off process for nitride LEDs from an Eco‐GaN template using an AlN/strip‐patterned‐SiO2 sacrificial layer

RH Horng, HH Hsueh, SL Ou, CT Tsai… - … status solidi (a), 2017 - Wiley Online Library
In this research, a nitride light‐emitting diode (LED) fabricated on an electroplated Cu
substrate can be removed from a GaN/sapphire (Eco‐GaN) template by conducting the …

GaN epilayer grown on Ga2O3 sacrificial layer for chemical lift-off application

TY Tsai, RH Horng, DS Wuu, SL Ou… - … and Solid-State …, 2011 - iopscience.iop.org
GaN-on-sapphire structure with a Ga 2 O 3 sacrificial layer was employed for the chemical
lift-off process application. The (overline 2 01) β-oriented Ga 2 O 3 thin film was first …