An extensive review is given of the results from literature on electron beam induced
deposition. Electron beam induced deposition is a complex process, where many and often …

In this study, a quantitative approach is proposed to understand the effect of the accelerating
voltage and the probe current on the physical resolution of EBSD. The accelerating voltage …

Contamination is an undesired side effect in many electron microscopy studies that covers
structures of interest and degrades resolution. Although contamination has been studied for …

Many experiments on the mechanics of nanostructures require the creation of rigid clamps at
specific locations. In this work, electron-beam-induced deposition (EBID) has been used to …

In this paper, we review the current state of phase plate imaging in a transmission electron
microscope. We focus especially on the hole-free phase plate design, also referred to as the …

Electron backscatter diffraction (EBSD) and electron probe microanalysis (EPMA)
measurements are combined to characterize an industrial produced dual-phase steel …

Publisher Summary Electron beam-induced deposition (EBID) is a technique to directly
deposit structures on a target by the electron‐induced dissociation of adsorbed precursor …

Unknown parameters critical to understanding the electron-precursor-substrate interactions
during electron-beam-induced deposition (EBID) have long limited our ability to fully control …

In this work we have developed a comprehensive dynamic model of electron beam induced
deposition (EBID) of residual hydrocarbon coupling mass transport, electron transport and …

A novel bilayer resist system consisting of a 3 nm thick titanium (Ti) layer on top of a 65 nm
thick poly (methylmethacrylate)(PMMA) layer was developed for mechanical …