[HTML][HTML] A review: Laser interference lithography for diffraction gratings and their applications in encoders and spectrometers
L Luo, S Shan, X Li - Sensors, 2024 - mdpi.com
The unique diffractive properties of gratings have made them essential in a wide range of
applications, including spectral analysis, precision measurement, optical data storage, laser …
applications, including spectral analysis, precision measurement, optical data storage, laser …
[HTML][HTML] High-Precision Chromatic Confocal Technologies: A Review
J Li, R Ma, J Bai - Micromachines, 2024 - mdpi.com
Chromatic confocal technology is widely used for precise, steady, and efficient displacement
measurement in many industrial fields. It employs the confocal and dispersion principles to …
measurement in many industrial fields. It employs the confocal and dispersion principles to …
A wavelength-stabilized and quasi-common-path heterodyne grating interferometer with sub-nanometer precision
G Wang, L Gao, G Huang, X Lei, C Cui… - IEEE Transactions …, 2024 - ieeexplore.ieee.org
Grating interferometers highly valued for high resolution, straightforward benchmark, and
insensitivity to environmental disturbances have become one of the most mainstream …
insensitivity to environmental disturbances have become one of the most mainstream …
High-fold optical subdivision blazed grating interferometer based on Mach-Zehnder interferometer
Z Zhang, G Zhao, Y Ban, X Wang, P Wei, D Niu… - Measurement, 2025 - Elsevier
A blazed grating interferometer with high-fold optical subdivision is proposed based on the
optical path design of Mach-Zehnder interferometer. In the designed measurement system …
optical path design of Mach-Zehnder interferometer. In the designed measurement system …
A novel peak positioning method for nanometer displacement measurement by optical linear encoder
X Wang, W Jiang, F Zhao, Y Fang, Z Zhang, X Ren… - Measurement, 2025 - Elsevier
In the field of precision measurement, subdividing displacement within the grating period to
achieve high precision and high resolution remains a significant challenge. For subdivision …
achieve high precision and high resolution remains a significant challenge. For subdivision …
Detection of Rotational Doppler Frequency and Measurement with Broadened Spectrum
Z Hua, Y Wang, Y Tan - IEEE Transactions on Instrumentation …, 2024 - ieeexplore.ieee.org
The Doppler effect can be divided into two types: the linear Doppler effect and the rotational
Doppler effect (RDE). The RDE of a vortex beam has attracted extensive attention in …
Doppler effect (RDE). The RDE of a vortex beam has attracted extensive attention in …
A high subdivision and light fluctuation-insensitive approach for grating displacement sensors
R Niu, G Chen, R Li, Z Jia, Z Feng - Optics and Lasers in Engineering, 2025 - Elsevier
This paper presents an innovative GPI-NCCSR subdivision approach for grating
displacement sensor based on grating projection imaging (GPI) and normalized cross …
displacement sensor based on grating projection imaging (GPI) and normalized cross …
Curing deformation compensation in bonding assembly for high-precision linear displacement encoder sensors
Linear displacement encoder sensors extensively appear in high-precision instruments, in
which the core scale is usually bonded with the scale base by adhesives. However, the …
which the core scale is usually bonded with the scale base by adhesives. However, the …
Absolute grating encoder with high-precision and large measurement range
S Wang, S Lu, F Cao, L Luo… - … , Diffractive Optics, and …, 2024 - spiedigitallibrary.org
In order to solve the problem of the mutual limitations of large measurement range and high
precision of absolute grating encoders, this paper employs absolute codes to individually …
precision of absolute grating encoders, this paper employs absolute codes to individually …
Phase measurement method based on sub-sampling solution for high-precision high-speed distance measurement
L Luo, S Lu, Y Wang, S Wang, F Cao… - Optical Metrology and …, 2024 - spiedigitallibrary.org
In this work, a solution based on sub-sampling technology for heterodyne signals is
proposed. While achieving higher measurement resolution and measurement speed, the …
proposed. While achieving higher measurement resolution and measurement speed, the …