Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various
merits, such as low power consumption, being lightweight, having a small volume, accurate …

Silicon carbide (SiC) is one of the most promising materials for applications in harsh
environments thanks to its excellent electrical, mechanical, and chemical properties. The …

Purpose Pressure, being one of the key variables investigated in scientific and engineering
research, requires critical and accurate measurement techniques. With the advancements in …

Microelectromechanical system (MEMS) pressure sensors based on silicon are widely used
and offer the benefits of miniaturization and high precision. However, they cannot easily …

The integration of 3D printed sensors into hosting structures has become a growing area of
research due to simplified assembly procedures, reduced system complexity, and lower …

Advances in siliconcarbide microfabrication and growth process optimization for
siliconcarbide nanostructures are ushering in new opportunities for microdevices capable of …

The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical–
mechanical systems (MEMS) sensors has been the subject of much discussion in the …

Enhancing the energy conversion efficiency is utmost important in renewable energy and
self-powered optoelectronic sensing applications. In this study, we propose the concept of a …

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS,
which includes an image sensor with 64 active pixels and a total of 1263 transistors on a …

The wide bandgap of silicon carbide (SiC) has attracted a large interest over the past years
in many research fields, such as power electronics, high operation temperature circuits …