Microelectromechanical systems (MEMS) tunable capacitors, switches or actuators are
widely applied in wireless communication systems. In the fabrication process etch holes are …

This letter demonstrates RF microelectromechanical systems (MEMS) fractal capacitors
possessing the highest reported self-resonant frequencies (SRFs) in PolyMUMPS to date …

This paper presents the capacitance modelling of RF MEMS shunt switch by using the
parallel plate, fringing field, and parasitic capacitance. The model carried out fringing …

Etching the large area of sacrificial layer under the microstructure to be released is a
common method used in microelectromechanical systems technology. In order to completely …

Movable suspended microstructures are the common feature of sensors or devices in the
fields of Complementary-Metal-Oxide-Semiconductors and Micro-Electro-Mechanical …

This paper presents some important design considerations usually ignored that need to be
taken into account when designing MEMS parallel plate variable capacitors. Explicitly, it …

In this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable
capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a …

This paper analyzes in detail the effect of nanoscale non-uniform deflections, caused by the
residual stress phenomenon and/or applied actuation dc voltages, on the capacitance in RF …

Condenser MEMS microphones are becoming a promising technology to substitute the
current standard microphones, and modelling such systems has become very important for …

Movable suspended microstructures are common features of sensors and devices in the
field of micro electro mechanical systems (MEMS). This paper addresses the study of …