Piezoelectric MEMS resonators: A review
Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
Temperature dependence of the elastic constants of doped silicon
Resonators fabricated in heavily doped silicon have been noted to have a reduced
frequency-temperature dependence compared with lightly doped silicon. The resonant …
frequency-temperature dependence compared with lightly doped silicon. The resonant …
[PDF][PDF] A review of the Hénon map and its physical interpretations
H Wen - School of Physics Georgia Institute of …, 2014 - chaosbk.physics.gatech.edu
In 1963, Lorenz proposed a system of three coupled differential equations, which is later
well known as the Lorenz flow. The Lorenz flow was first studied because it is of interest for …
well known as the Lorenz flow. The Lorenz flow was first studied because it is of interest for …
A monolithic CMOS-MEMS oscillator based on an ultra-low-power ovenized micromechanical resonator
A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …
Temperature-insensitive structure design of micromachined resonant accelerometers
Y Yin, Z Fang, Y Liu, F Han - Sensors, 2019 - mdpi.com
Micromachined resonant accelerometers (MRAs), especially those devices fabricated by
silicon on glass technology, suffer from temperature drift error caused by inherent thermal …
silicon on glass technology, suffer from temperature drift error caused by inherent thermal …
Temperature compensation for MEMS resonant accelerometer based on genetic algorithm optimized backpropagation neural network
Temperature compensation with high accuracy is crucial for improving the performance of
MEMS resonant accelerometers. In this paper, we propose an effective temperature …
MEMS resonant accelerometers. In this paper, we propose an effective temperature …
Design, modeling and characterization of high-performance bulk-mode piezoelectric MEMS resonators
In this paper, the design, modeling and characterization of width-extensional (WE) mode
piezoelectric microelectromechanical systems (MEMS) resonators are presented. The …
piezoelectric microelectromechanical systems (MEMS) resonators are presented. The …
A micro-oven-controlled dual-mode piezoelectric MEMS resonator with±400 PPB stability over− 40 to 80° C temperature range
W Jia, W Chen, Y **ao, Z Wu… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, the design, implementation, and characterization of a micro-oven-controlled
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …
dual-mode piezoelectric microelectromechanical system (MEMS) resonator are presented …
A MEMS resonant accelerometer with high performance of temperature based on electrostatic spring softening and continuous ring-down technique
Y Wang, J Zhang, Z Yao, C Lin, T Zhou… - IEEE Sensors …, 2018 - ieeexplore.ieee.org
Temperature fluctuations seriously damage the performance of resonant accelerometers.
Two approaches have been proposed in this paper to address this problem. In structural …
Two approaches have been proposed in this paper to address this problem. In structural …