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Two decades of ceria nanoparticles research: Structure, properties and emerging applications
Cerium oxide nanoparticles (CeNPs) are versatile materials with unique and unusual
properties that vary depending on their surface chemistry, size, shape, coating, oxidation …
properties that vary depending on their surface chemistry, size, shape, coating, oxidation …
A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization
J Seo - Journal of Materials Research, 2021 - Springer
As the minimum feature size of integrated circuit elements has shrunk below 7 nm, chemical
mechanical planarization (CMP) technology has grown by leaps and bounds over the past …
mechanical planarization (CMP) technology has grown by leaps and bounds over the past …
Improvement of oxide chemical mechanical polishing performance by increasing Ce3+/Ce4+ ratio in ceria slurry via hydrogen reduction
Ceria-based abrasive is widely used in the oxide chemical mechanical polishing (CMP)
process due to its high polishing performance. Ce 3+ ions on the surface of ceria form a Ce …
process due to its high polishing performance. Ce 3+ ions on the surface of ceria form a Ce …
Self-healing ceria-modified coating for corrosion protection of AZ31 magnesium alloy
A hybrid siloxane-based coating was modified with CeO 2 nanoparticles and applied on
AZ31. The corrosion protection performance was evaluated via Electrochemical Impedance …
AZ31. The corrosion protection performance was evaluated via Electrochemical Impedance …
Benzotriazole loaded CeO2 nano-containers towards superior anti-corrosive silane coating for protection of copper
HH Zhang, X Zhang, H Bian, L Zhang, Y Chen… - Colloids and Surfaces A …, 2024 - Elsevier
In this work, we synthesized a superhydrophobic self-healing silane hybrid coating based on
benzotriazole (BTA) loaded hollow CeO 2 nano-capsules on copper substrate and …
benzotriazole (BTA) loaded hollow CeO 2 nano-capsules on copper substrate and …
Perspective—recent advances and thoughts on Ceria particle applications in chemical mechanical planarization
Along with the remarkable growth in the complexity of semiconductor fabrication technology,
chemical mechanical planarization (CMP) has evolved and become progressively more …
chemical mechanical planarization (CMP) has evolved and become progressively more …
Preparation and characterization of hollow ceria based smart anti-corrosive coatings on copper
HH Zhang, H Bian, X Zhang, L Zhang, Y Chen… - Surfaces and …, 2024 - Elsevier
Hollow CeO 2 nanoparticles were prepared and employed as nano-carriers to encapsule
benzotriazole inhibitor. The benzotriazole loaded formulations were co-electrodeposited …
benzotriazole inhibitor. The benzotriazole loaded formulations were co-electrodeposited …
Corrosion resistance of a novel ceria doped aluminum phosphate ceramic coating on cast Al-Si alloy by steam-assisted curing
X Huang, L Yu, Y Dong - Corrosion Science, 2021 - Elsevier
A series of aluminum phosphate ceramic coating with the entrapped ceria (CeO 2)
nanoparticles, which is denoted APC, were constructed by steam-assisted curing method on …
nanoparticles, which is denoted APC, were constructed by steam-assisted curing method on …
Contamination mechanism of ceria particles on the oxide surface after the CMP process
The contamination behavior of ceria particles (50 and 100 nm) with oxide surfaces at pH 4
and 8 was studied using dip** and polishing conditions. Higher contamination at pH 4 …
and 8 was studied using dip** and polishing conditions. Higher contamination at pH 4 …
Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO3 and Its Thermal Conversion to Ceria with High Polishing Performance
J Li, R He, G Guo, Y Li, Y Liao, Y Li - ACS omega, 2023 - ACS Publications
Layered quasi-triangular Ce (OH) CO3 assembled from primary nanoparticles was
synthesized via a solvothermal method and converted into CeO2 abrasive particles by …
synthesized via a solvothermal method and converted into CeO2 abrasive particles by …