Two decades of ceria nanoparticles research: Structure, properties and emerging applications

A Othman, A Gowda, D Andreescu, MH Hassan… - Materials …, 2024 - pubs.rsc.org
Cerium oxide nanoparticles (CeNPs) are versatile materials with unique and unusual
properties that vary depending on their surface chemistry, size, shape, coating, oxidation …

A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization

J Seo - Journal of Materials Research, 2021 - Springer
As the minimum feature size of integrated circuit elements has shrunk below 7 nm, chemical
mechanical planarization (CMP) technology has grown by leaps and bounds over the past …

Improvement of oxide chemical mechanical polishing performance by increasing Ce3+/Ce4+ ratio in ceria slurry via hydrogen reduction

J Lee, E Kim, C Bae, H Seok, J Cho, K Aydin… - Materials Science in …, 2023 - Elsevier
Ceria-based abrasive is widely used in the oxide chemical mechanical polishing (CMP)
process due to its high polishing performance. Ce 3+ ions on the surface of ceria form a Ce …

Self-healing ceria-modified coating for corrosion protection of AZ31 magnesium alloy

LM Calado, MG Taryba, MJ Carmezim, MF Montemor - Corrosion Science, 2018 - Elsevier
A hybrid siloxane-based coating was modified with CeO 2 nanoparticles and applied on
AZ31. The corrosion protection performance was evaluated via Electrochemical Impedance …

Benzotriazole loaded CeO2 nano-containers towards superior anti-corrosive silane coating for protection of copper

HH Zhang, X Zhang, H Bian, L Zhang, Y Chen… - Colloids and Surfaces A …, 2024 - Elsevier
In this work, we synthesized a superhydrophobic self-healing silane hybrid coating based on
benzotriazole (BTA) loaded hollow CeO 2 nano-capsules on copper substrate and …

Perspective—recent advances and thoughts on Ceria particle applications in chemical mechanical planarization

J Seo, K Kim, H Kang, SV Babu - ECS Journal of Solid State …, 2022 - iopscience.iop.org
Along with the remarkable growth in the complexity of semiconductor fabrication technology,
chemical mechanical planarization (CMP) has evolved and become progressively more …

Preparation and characterization of hollow ceria based smart anti-corrosive coatings on copper

HH Zhang, H Bian, X Zhang, L Zhang, Y Chen… - Surfaces and …, 2024 - Elsevier
Hollow CeO 2 nanoparticles were prepared and employed as nano-carriers to encapsule
benzotriazole inhibitor. The benzotriazole loaded formulations were co-electrodeposited …

Corrosion resistance of a novel ceria doped aluminum phosphate ceramic coating on cast Al-Si alloy by steam-assisted curing

X Huang, L Yu, Y Dong - Corrosion Science, 2021 - Elsevier
A series of aluminum phosphate ceramic coating with the entrapped ceria (CeO 2)
nanoparticles, which is denoted APC, were constructed by steam-assisted curing method on …

Contamination mechanism of ceria particles on the oxide surface after the CMP process

KM Han, SY Han, S Sahir, NP Yerriboina… - ECS Journal of Solid …, 2020 - iopscience.iop.org
The contamination behavior of ceria particles (50 and 100 nm) with oxide surfaces at pH 4
and 8 was studied using dip** and polishing conditions. Higher contamination at pH 4 …

Synthesis of Hierarchical Layered Quasi-Triangular Ce(OH)CO3 and Its Thermal Conversion to Ceria with High Polishing Performance

J Li, R He, G Guo, Y Li, Y Liao, Y Li - ACS omega, 2023 - ACS Publications
Layered quasi-triangular Ce (OH) CO3 assembled from primary nanoparticles was
synthesized via a solvothermal method and converted into CeO2 abrasive particles by …