Aluminum nitride photonic integrated circuits: from piezo-optomechanics to nonlinear optics
The commercial success of radio-frequency acoustic filters in wireless communication
systems has launched aluminum nitride (AlN) as one of the most widely used …
systems has launched aluminum nitride (AlN) as one of the most widely used …
Reactive sputtering of aluminum nitride (002) thin films for piezoelectric applications: A review
A Iqbal, F Mohd-Yasin - Sensors, 2018 - mdpi.com
We summarize the recipes and describe the role of sputtering parameters in producing
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is …
High precision pressure sensors based on SAW devices in the GHz range
JG Rodríguez-Madrid, GF Iriarte, OA Williams… - Sensors and Actuators A …, 2013 - Elsevier
In this paper, an AlN/free-standing nanocrystalline diamond (NCD) system is proposed in
order to process high frequency surface acoustic wave (SAW) resonators for sensing …
order to process high frequency surface acoustic wave (SAW) resonators for sensing …
Structural and optical characterization of low-temperature ALD crystalline AlN
P Motamedi, K Cadien - Journal of Crystal Growth, 2015 - Elsevier
A plasma enhanced atomic layer deposition (PEALD) process has been used to deposit
crystalline AlN thin films at 250° C using nitrogen 5% hydrogen plasma and …
crystalline AlN thin films at 250° C using nitrogen 5% hydrogen plasma and …
Comparison of the structural properties and residual stress of AlN films deposited by dc magnetron sputtering and high power impulse magnetron sputtering at …
KA Aissa, A Achour, J Camus, L Le Brizoual, PY Jouan… - Thin Solid Films, 2014 - Elsevier
Aluminium nitride (AlN) films were deposited by dc magnetron sputtering (dcMS) and high
power impulse magnetron sputtering (HiPIMS) on (100) oriented silicon (Si) substrates, in Ar …
power impulse magnetron sputtering (HiPIMS) on (100) oriented silicon (Si) substrates, in Ar …
AlN texturing and piezoelectricity on flexible substrates for sensor applications
We show that AlN-based piezocapacitors with relatively high piezoelectric coefficient (d 33)
values (3–4 pC/N) can be fabricated on polyimide (PI) substrates at 160 C or even at room …
values (3–4 pC/N) can be fabricated on polyimide (PI) substrates at 160 C or even at room …
Structural, surface, and optical properties of AlN thin films grown on different substrates by PEALD
S Liu, Y Li, J Tao, R Tang, X Zheng - Crystals, 2023 - mdpi.com
Plasma-enhanced atomic layer deposition was employed to grow aluminum nitride (AlN)
thin films on Si (100), Si (111), and c-plane sapphire substrates at 250° C …
thin films on Si (100), Si (111), and c-plane sapphire substrates at 250° C …
Structural and optical properties of AlN sputtering deposited on sapphire substrates with various orientations
X Peng, J Sun, H Liu, L Li, Q Wang, L Wu… - Journal of …, 2022 - iopscience.iop.org
AlN thin films were deposited on c-, a-and r-plane sapphire substrates by the magnetron
sputtering technique. The influence of high-temperature thermal annealing (HTTA) on the …
sputtering technique. The influence of high-temperature thermal annealing (HTTA) on the …
Analysis and optimization of sputter deposited AlN-layers for flexural plate wave devices
Aluminum nitride (AlN) thin films deposited by reactive radio frequency magnetron sputtering
in an Ar/N 2 discharge on Si (001) substrates were studied with respect to structure, stress …
in an Ar/N 2 discharge on Si (001) substrates were studied with respect to structure, stress …
FEM analysis of piezoelectric film as IDT on the diamond substrate to enhance the quality factor of SAW devices
B **e, F Ding, Z Dong, H Shang, D Huang… - Diamond and related …, 2020 - Elsevier
This paper describes an innovative electro-acoustic coupling structure with a Patterned
Piezoelectric film as Inter-Digital Transducer (PP-IDT) on the diamond substrate for Surface …
Piezoelectric film as Inter-Digital Transducer (PP-IDT) on the diamond substrate for Surface …