In order to compensate for the inherent hysteresis and magnetic flux leakage of large stroke
Maxwell electromagnetic actuators, a hysteresis modeling method including a magnetic flux …

Reluctance actuators, being capable of providing high force densities, have been widely
adopted for solving the task of high force applications. However, the strong non-linearity in …

This paper investigates the output feedback tracking control of the motion system driven by
an electromagnetic actuator with uncertain nonlinearities and unknown gap variation …

Reluctance actuators (RA) are a type of electromagnetic actuator that offers high forces for
short-range motions. The RA takes advantage of the electromagnetic reluctance force …

A short-stroke reluctance actuator linearization scheme that simultaneously achieves high
linearity, high bandwidth, and low stiffness is demonstrated. These properties are required in …

Recently, the reluctance actuator has attracted great attention to replace the Lorentz actuator
in the next generation of wafer scanners in semi‐conductor lithography machines. The …

This paper aims to overcome complex dynamic problems such as low dam** resonant
frequency, resonant point drift, and uncertainty of dynamic model of the large stroke …

Recent research and assessments have shown that the reluctance actuator is a promising
candidate to drive the next generation precision motion system of the lithography machine in …

Semiconductor photolithography equipment requires an actuation system that can satisfy
high acceleration and precision demands on the nanoscale in order to operate with high …

This paper presents an efficient and accurate dynamical model of reluctance actuators,
suitable for prediction and control applications. It is a hybrid lumped-parameter state-space …