Role of sacrificing layer on glasses during ultrasonic machining (USM)-a review

S Rai, S Srivastava, M Vishnoi, TG Mamatha - Materials Today …, 2023 - Elsevier
Ultrasonic machining is a non-traditional, non-thermal material removal method; used to
fabricate channels and drill holes in brittle materials such as glasses and wafers by using …

A novel investigation of sacrificing layer effect on micro-channel fabrication of glass using rotary ultrasonic machining

S Rai, M Vishnoi, TG Mamatha - Journal of the Brazilian Society of …, 2023 - Springer
During micro-ultrasonic machining of brittle materials, lateral vibration of the tool and errors
due to the placement of the workpiece leads to overcut and surface damage. Hence, this …

Micro-channel fabrication on silicon wafer (100) using rotary ultrasonic machining

TG Mamatha, M Vishnoi, S Srivastava, V Malik… - Silicon, 2022 - Springer
Abstract In the Present work Rotary Ultrasonic machining is used for fabrication of micro
channel on Silicon wafer. Silicon wafer possesses a plethora of applications, from their use …

Effect of Spindle Speed and Feed Rate on Machining of Zirconia Bio-ceramic Using CNC Rotary Ultrasonic Machine

A Kushwaha, A Anuragi, M Vishnoi… - … Conference on Scientific …, 2023 - Springer
Rotary ultrasonic machining (RUM) is an inexpensive and environment favorable method for
machining brittle material such as advanced ceramics. The main objective of this review was …