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Advances in the atomic force microscopy for critical dimension metrology
Downscaling, miniaturization and 3D staking of the micro/nano devices are burgeoning
phenomena in the semiconductor industry which have posed sophisticated challenges in …
phenomena in the semiconductor industry which have posed sophisticated challenges in …
Metrological large range scanning probe microscope
G Dai, F Pohlenz, HU Danzebrink, M Xu… - Review of scientific …, 2004 - pubs.aip.org
We describe a metrological large range scanning probe microscope (LR-SPM) with an Abbe
error free design and direct interferometric position measurement capability, aimed at …
error free design and direct interferometric position measurement capability, aimed at …
Advances in scanning force microscopy for dimensional metrology
This paper presents the state of the art in scanning force microscopy for dimensional
metrology. A detailed description is given of the important factors affecting the major …
metrology. A detailed description is given of the important factors affecting the major …
Accurate and traceable calibration of one-dimensional gratings
G Dai, L Koenders, F Pohlenz, T Dziomba… - Measurement …, 2005 - iopscience.iop.org
Accurate and traceable calibration of lateral standards (1D and 2D gratings) is a basic
metrological task for nano-and microtechnology. Both the mean pitch and the uniformity of …
metrological task for nano-and microtechnology. Both the mean pitch and the uniformity of …
Comparative study of stromal bed quality by using mechanical, IntraLase femtosecond laser 15-and 30-kHz microkeratomes
MA Sarayba, TS Ignacio, PS Binder, DB Tran - Cornea, 2007 - journals.lww.com
Purpose: To evaluate corneal stromal bed quality of lamellar keratectomy in laser in situ
keratomileusis (LASIK) procedures by using mechanical and femtosecond laser …
keratomileusis (LASIK) procedures by using mechanical and femtosecond laser …
A 60 kHz IntraLase femtosecond laser creates a smoother LASIK stromal bed surface compared to a Zyoptix XP mechanical microkeratome in human donor eyes
MA Sarayba, TS Ignacio, DB Tran… - Journal of refractive …, 2007 - journals.healio.com
ABSTRACT PURPOSE: To compare the stromal surfaces created by the latest mechanical
microkeratome and femtosecond laser technologies. METHODS: Laser in situ …
microkeratome and femtosecond laser technologies. METHODS: Laser in situ …
Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors
To establish of standard technique of nanolength measurement in a two-dimensional plane,
a new (AFM) system has been designed. In this system, measurement uncertainty is …
a new (AFM) system has been designed. In this system, measurement uncertainty is …
Quantifying the influence of surface texture and shape on structure from motion 3D reconstructions
In general, optical methods for geometrical measurements are influenced by the surface
properties of the examined object. In Structure from Motion (SfM), local variations in surface …
properties of the examined object. In Structure from Motion (SfM), local variations in surface …
Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation
I Misumi, K Naoi, K Sugawara, S Gonda - Measurement, 2015 - Elsevier
Surface roughness measurements are sometimes performed using an atomic force
microscope (AFM) in order to evaluate conditions of thin film fabrication and material surface …
microscope (AFM) in order to evaluate conditions of thin film fabrication and material surface …
A metrological large range atomic force microscope with improved performance
G Dai, H Wolff, F Pohlenz… - Review of Scientific …, 2009 - pubs.aip.org
A metrological large range atomic force microscope (Met. LR-AFM) has been set up and
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …