Advances in the atomic force microscopy for critical dimension metrology

D Hussain, K Ahmad, J Song… - Measurement Science and …, 2016‏ - iopscience.iop.org
Downscaling, miniaturization and 3D staking of the micro/nano devices are burgeoning
phenomena in the semiconductor industry which have posed sophisticated challenges in …

Metrological large range scanning probe microscope

G Dai, F Pohlenz, HU Danzebrink, M Xu… - Review of scientific …, 2004‏ - pubs.aip.org
We describe a metrological large range scanning probe microscope (LR-SPM) with an Abbe
error free design and direct interferometric position measurement capability, aimed at …

Advances in scanning force microscopy for dimensional metrology

HU Danzebrink, L Koenders, G Wilkening, A Yacoot… - CIRP annals, 2006‏ - Elsevier
This paper presents the state of the art in scanning force microscopy for dimensional
metrology. A detailed description is given of the important factors affecting the major …

Accurate and traceable calibration of one-dimensional gratings

G Dai, L Koenders, F Pohlenz, T Dziomba… - Measurement …, 2005‏ - iopscience.iop.org
Accurate and traceable calibration of lateral standards (1D and 2D gratings) is a basic
metrological task for nano-and microtechnology. Both the mean pitch and the uniformity of …

Comparative study of stromal bed quality by using mechanical, IntraLase femtosecond laser 15-and 30-kHz microkeratomes

MA Sarayba, TS Ignacio, PS Binder, DB Tran - Cornea, 2007‏ - journals.lww.com
Purpose: To evaluate corneal stromal bed quality of lamellar keratectomy in laser in situ
keratomileusis (LASIK) procedures by using mechanical and femtosecond laser …

A 60 kHz IntraLase femtosecond laser creates a smoother LASIK stromal bed surface compared to a Zyoptix XP mechanical microkeratome in human donor eyes

MA Sarayba, TS Ignacio, DB Tran… - Journal of refractive …, 2007‏ - journals.healio.com
ABSTRACT PURPOSE: To compare the stromal surfaces created by the latest mechanical
microkeratome and femtosecond laser technologies. METHODS: Laser in situ …

Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors

D Kim, D Kang, J Shim, I Song, D Gweon - Review of Scientific …, 2005‏ - pubs.aip.org
To establish of standard technique of nanolength measurement in a two-dimensional plane,
a new (AFM) system has been designed. In this system, measurement uncertainty is …

Quantifying the influence of surface texture and shape on structure from motion 3D reconstructions

MS Nielsen, I Nikolov, EK Kruse, J Garnæs… - Sensors, 2022‏ - mdpi.com
In general, optical methods for geometrical measurements are influenced by the surface
properties of the examined object. In Structure from Motion (SfM), local variations in surface …

Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

I Misumi, K Naoi, K Sugawara, S Gonda - Measurement, 2015‏ - Elsevier
Surface roughness measurements are sometimes performed using an atomic force
microscope (AFM) in order to evaluate conditions of thin film fabrication and material surface …

A metrological large range atomic force microscope with improved performance

G Dai, H Wolff, F Pohlenz… - Review of Scientific …, 2009‏ - pubs.aip.org
A metrological large range atomic force microscope (Met. LR-AFM) has been set up and
improved over the past years at Physikalisch-Technische Bundesanstalt (PTB). Being …