Exceptional points enhance sensing in silicon micromechanical resonators

MN Zhang, L Dong, LF Wang, QA Huang - Microsystems & …, 2024 - nature.com
Exceptional points (EPs) have recently emerged as a new method for engineering the
response of open physical systems, that is, systems that interact with the environment. The …

On-Chip testing: A miniaturized lab to assess sub-micron uncertainties in polysilicon MEMS

S Mariani, A Ghisi, R Mirzazadeh… - Micro and …, 2018 - ingentaconnect.com
An increasing impact of micromechanically governed uncertainties is nowadays foreseen
due to the trend of progressively reducing the footprint of MEMS (microelectromechanical …

An adjustable-stiffness MEMS force sensor: Design, characterization, and control

M Maroufi, H Alemansour, MB Coskun… - Mechatronics, 2018 - Elsevier
This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …

Characterization of Sensitivity of Time Domain MEMS Accelerometer

E Li, J Jian, F Yang, Z Ma, Y Hao, H Chang - Micromachines, 2024 - mdpi.com
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The
sensitivity is defined by the increment in the measured time interval per gravitational …

[HTML][HTML] Monolithic binary stiffness building blocks for mechanical digital machines

PR Kuppens, MA Bessa, JL Herder… - Extreme Mechanics …, 2021 - Elsevier
We introduce two essential building blocks with binary stiffness for mechanical digital
machines. The large scale fully compliant mechanisms have rectilinear and rotational …

A force-compensated compliant MEMS-amplifier with electrostatic anti-springs

P Schmitt, M Hoffmann - Microsystems & Nanoengineering, 2023 - nature.com
In this paper, an electrostatic compliant mechanical amplifier intended for force-
compensated displacement amplification in MEMS sensor applications is described …

Acoustic Resonance Tuning by High-Order Lorentzian Mixing

H Kim, Y Seong, K Kwon, TY Hwang, H Shin - Nano Letters, 2024 - ACS Publications
Nanoscale mechanical resonators have attracted a great deal of attention for signal
processing, sensors, and quantum applications. Recent progress in ultrahigh-Q acoustic …

Micromechanical characterization of polysilicon films through on-chip tests

R Mirzazadeh, S Eftekhar Azam, S Mariani - Sensors, 2016 - mdpi.com
When the dimensions of polycrystalline structures become comparable to the average grain
size, some reliability issues can be reported for the moving parts of inertial …

Permanent stiffness reduction by thermal oxidation of silicon

PR Kuppens, JL Herder, N Tolou - Journal of …, 2019 - ieeexplore.ieee.org
Stiffness in compliant micro mechanisms can negatively affect performance. Current
methods for stiffness reduction in micro electro mechanical systems (MEMS) consume …

Structural design and testing of a micromechanical resonant accelerometer

H Liu, Y Zhang, J Wu - Micromachines, 2022 - mdpi.com
Micromechanical resonant accelerometers based on electrostatic stiffness have the
advantage of it being possible to adjust their sensitivity by changing the detection voltage …