Exceptional points enhance sensing in silicon micromechanical resonators
MN Zhang, L Dong, LF Wang, QA Huang - Microsystems & …, 2024 - nature.com
Exceptional points (EPs) have recently emerged as a new method for engineering the
response of open physical systems, that is, systems that interact with the environment. The …
response of open physical systems, that is, systems that interact with the environment. The …
On-Chip testing: A miniaturized lab to assess sub-micron uncertainties in polysilicon MEMS
An increasing impact of micromechanically governed uncertainties is nowadays foreseen
due to the trend of progressively reducing the footprint of MEMS (microelectromechanical …
due to the trend of progressively reducing the footprint of MEMS (microelectromechanical …
An adjustable-stiffness MEMS force sensor: Design, characterization, and control
This paper presents a novel one-degree-of-freedom microelectromechanical systems
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …
(MEMS) force sensor. The high-bandwidth device contains on-chip sensing and actuation …
Characterization of Sensitivity of Time Domain MEMS Accelerometer
This paper characterizes the sensitivity of a time domain MEMS accelerometer. The
sensitivity is defined by the increment in the measured time interval per gravitational …
sensitivity is defined by the increment in the measured time interval per gravitational …
[HTML][HTML] Monolithic binary stiffness building blocks for mechanical digital machines
We introduce two essential building blocks with binary stiffness for mechanical digital
machines. The large scale fully compliant mechanisms have rectilinear and rotational …
machines. The large scale fully compliant mechanisms have rectilinear and rotational …
A force-compensated compliant MEMS-amplifier with electrostatic anti-springs
P Schmitt, M Hoffmann - Microsystems & Nanoengineering, 2023 - nature.com
In this paper, an electrostatic compliant mechanical amplifier intended for force-
compensated displacement amplification in MEMS sensor applications is described …
compensated displacement amplification in MEMS sensor applications is described …
Acoustic Resonance Tuning by High-Order Lorentzian Mixing
Nanoscale mechanical resonators have attracted a great deal of attention for signal
processing, sensors, and quantum applications. Recent progress in ultrahigh-Q acoustic …
processing, sensors, and quantum applications. Recent progress in ultrahigh-Q acoustic …
Micromechanical characterization of polysilicon films through on-chip tests
When the dimensions of polycrystalline structures become comparable to the average grain
size, some reliability issues can be reported for the moving parts of inertial …
size, some reliability issues can be reported for the moving parts of inertial …
Permanent stiffness reduction by thermal oxidation of silicon
PR Kuppens, JL Herder, N Tolou - Journal of …, 2019 - ieeexplore.ieee.org
Stiffness in compliant micro mechanisms can negatively affect performance. Current
methods for stiffness reduction in micro electro mechanical systems (MEMS) consume …
methods for stiffness reduction in micro electro mechanical systems (MEMS) consume …
Structural design and testing of a micromechanical resonant accelerometer
H Liu, Y Zhang, J Wu - Micromachines, 2022 - mdpi.com
Micromechanical resonant accelerometers based on electrostatic stiffness have the
advantage of it being possible to adjust their sensitivity by changing the detection voltage …
advantage of it being possible to adjust their sensitivity by changing the detection voltage …