β-Ga2O3 material properties, growth technologies, and devices: a review

M Higashiwaki - AAPPS Bulletin, 2022 - Springer
Rapid progress in β-gallium oxide (β-Ga 2 O 3) material and device technologies has been
made in this decade, and its superior material properties based on the very large bandgap …

[HTML][HTML] MOCVD growth of high purity Ga2O3 epitaxial films using trimethylgallium precursor

G Seryogin, F Alema, N Valente, H Fu… - Applied Physics …, 2020 - pubs.aip.org
We report on the growth of β-Ga 2 O 3 thin films using trimethylgallium (TMGa) as a source
for gallium and pure O 2 for oxidation. The growth rate of the films was found to linearly …

Recent advances in the growth of gallium oxide thin films employing various growth techniques—a review

BR Tak, S Kumar, AK Kapoor, D Wang… - Journal of Physics D …, 2021 - iopscience.iop.org
Abstract Gallium oxide (Ga 2 O 3) is rapidly emerging as a material of choice for the
development of solar blind photodetectors and power electronic devices which are …

[HTML][HTML] Progress and challenges in the development of ultra-wide bandgap semiconductor α-Ga2O3 toward realizing power device applications

Y Oshima, E Ahmadi - Applied Physics Letters, 2022 - pubs.aip.org
Ultra-wide-bandgap (UWBG) semiconductors, such as Ga 2 O 3 and diamond, have been
attracting increasing attention owing to their potential to realize high-performance power …

[HTML][HTML] Ge do** of β-Ga2O3 by MOCVD

F Alema, G Seryogin, A Osinsky, A Osinsky - APL Materials, 2021 - pubs.aip.org
We report on the Ge do** of Ga 2 O 3 using metalorganic chemical vapor deposition
(MOCVD) epitaxy. The effects of the GeH 4/N 2 flow rate, substrate temperature, VI/III ratio …

A perspective on the electro-thermal co-design of ultra-wide bandgap lateral devices

S Choi, S Graham, S Chowdhury, ER Heller… - Applied Physics …, 2021 - pubs.aip.org
Fundamental research and development of ultra-wide bandgap (UWBG) semiconductor
devices are under way to realize next-generation power conversion and wireless …

β‐Gallium Oxide Devices: Progress and Outlook

M Higashiwaki - physica status solidi (RRL)–Rapid Research …, 2021 - Wiley Online Library
Beta‐gallium oxide (β-Ga 2 O 3) has a history of research and development for over 70
years; however, it has attracted little attention as a semiconductor material for a long time …

Ga2O3 and Related Ultra-Wide Bandgap Power Semiconductor Oxides: New Energy Electronics Solutions for CO2 Emission Mitigation

Z Chi, JJ Asher, MR Jennings, E Chikoidze… - Materials, 2022 - mdpi.com
Currently, a significant portion (~ 50%) of global warming emissions, such as CO2, are
related to energy production and transportation. As most energy usage will be electrical (as …

Activation of implanted Si, Ge, and Sn donors in high-resistivity halide vapor phase epitaxial β-Ga2O3: N with high mobility

JA Spencer, MJ Tadjer, AG Jacobs, MA Mastro… - Applied Physics …, 2022 - pubs.aip.org
Activation of implanted donors into a highly-resistive, nitrogen-doped homoepitaxial β-Ga 2
O 3 has been investigated. Nitrogen acceptors with the concentration of∼ 10 17 cm− 3 were …