Die singulation technologies for advanced packaging: A critical review

WS Lei, A Kumar, R Yalamanchili - … of Vacuum Science & Technology B, 2012 - pubs.aip.org
Die singulation, also known as wafer dicing, is reviewed in terms of the brief history, critical
challenges, characterization of singulation quality, different singulation technologies and …

Precision machining by dicing blades: a systematic review

Z Yuan, A Riaz, B Chohan - Machines, 2023 - mdpi.com
Diamond dicing blades are profound cutting tools that find their applications in
semiconductor back-end packaging and assembly processes. To fully appreciate the …

Investigation of chip** and wear of silicon wafer dicing

JW Lin, MH Cheng - Journal of Manufacturing Processes, 2014 - Elsevier
Wafer dicing chip** and blade wear processes in transient and steady stages were
investigated. Dicing blades with two different diamond grit sizes were used to cut wafers. In …

Investigation on the machining performance of copper-based diamond ultra-thin dicing blades manufactured by fused deposition modeling and sintering (FDMS)

T He, S Zhang, WS Yip, S To, J Wu, L Liu, D Wu… - Tribology …, 2023 - Elsevier
Utilizing FDMS technology to manufacture ultra-thin diamond blades can enhance its
machining performance. In this study, the machinability of ultrathin diamond blades …

Dynamics features of Cu-wire bonding during overhang bonding process

L Junhui, L Linggang, M Bangke… - IEEE Electron Device …, 2011 - ieeexplore.ieee.org
Cu-wire overhang bonding process is investigated first by a high-speed camera system. It
was found that the greater impact, rebound, and deflection of overhang die during the Cu …

Implementing a Raman silicon nanocavity laser for integrated optical circuits by using a (100) SOI wafer with a 45-degree-rotated top silicon layer

Y Yamauchi, M Okano, H Shishido, S Noda… - OSA …, 2019 - opg.optica.org
Raman silicon (Si) lasers based on high-quality-factor photonic crystal nanocavities are very
compact and can operate at excitation powers of less than one microwatt. For the best …

Metallic glass coating for improving diamond dicing performance

JP Chu, BZ Lai, P Yiu, YL Shen, CW Chang - Scientific Reports, 2020 - nature.com
This is the first report on the coating of diamond dicing blades with metallic glass (MG)
coating to reduce chip** when used to cut Si, SiC, sapphire, and patterned sapphire …

Study of underfill corner cracks by the confocal-DIC and phantom-nodes methods

Y Yang, MK Toure, PM Souare, E Duchesne… - Microelectronics …, 2022 - Elsevier
In a flip chip package, due to the sharp square chip corner geometry and the loading from
mismatches in the coefficients of thermal expansion between materials in the assembly, a …

Automated classification scheme plus AVM for wafer sawing processes

YM Hsieh, R Lu, JW Lu, FT Cheng… - IEEE Robotics and …, 2020 - ieeexplore.ieee.org
For the current wafer sawing process, the wafers in the same lot are inspected at the end of
the entire process. Therefore, a defect, such as chip**, occurs during processing will only …

Overview and emerging challenges in mechanical dicing of silicon wafers

VP Ganesh, C Lee - 2006 8th Electronics Packaging …, 2006 - ieeexplore.ieee.org
Overview and emerging challenges in mechanical dicing of silicon wafers Page 1 Overview
and Emerging Challenges in Mechanical Dicing of Silicon Wafers Ganesh VP and Charles …