Piezoelectric MEMS based acoustic sensors: A review
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …
Processing, structure, properties, and applications of PZT thin films
N Izyumskaya, YI Alivov, SJ Cho, H Morkoç… - Critical reviews in …, 2007 - Taylor & Francis
There has been a resurgence of complex oxides of late owing to their ferroelectric and
ferromagnetic properties. Although these properties had been recognized decades ago, the …
ferromagnetic properties. Although these properties had been recognized decades ago, the …
Chemical solution deposition of perovskite thin films
RW Schwartz - Chemistry of materials, 1997 - ACS Publications
The use of chemical solution deposition for the fabrication of perovskite thin films is
reviewed. A variety of approaches including sol− gel, chelate, and metalloorganic …
reviewed. A variety of approaches including sol− gel, chelate, and metalloorganic …
[HTML][HTML] Chemical solution deposition of electronic oxide films
The chemical solution deposition (CSD) technique as a highly flexible method for the
fabrication of electronic oxide thin films is reviewed. Various chemical aspects of different …
fabrication of electronic oxide thin films is reviewed. Various chemical aspects of different …
Lead lanthanum zirconate titanate ceramic thin films for energy storage
An acetic-acid-based sol–gel method was used to deposit lead lanthanum zirconate titanate
(PLZT, 8/52/48) thin films on either platinized silicon (Pt/Si) or nickel buffered by a lanthanum …
(PLZT, 8/52/48) thin films on either platinized silicon (Pt/Si) or nickel buffered by a lanthanum …
Processing and characterization of piezoelectric materials and integration into microelectromechanical systems
DL Polla, LF Francis - Annual review of materials science, 1998 - annualreviews.org
▪ Abstract Piezoelectric materials have been integrated with silicon microelectromechanical
systems (MEMS) in both microsensor and microactuator applications. Thin-film materials …
systems (MEMS) in both microsensor and microactuator applications. Thin-film materials …
Oxides, oxides, and more oxides: high-κ oxides, ferroelectrics, ferromagnetics, and multiferroics
N Izyumskaya, Y Alivov, H Morkoç - Critical Reviews in Solid State …, 2009 - Taylor & Francis
We review and critique the recent developments on multifunctional oxide materials, which
are gaining a good deal of interest. Recongnizing that this is a vast area, the focus of this …
are gaining a good deal of interest. Recongnizing that this is a vast area, the focus of this …
Control of the morphology of CSD-prepared (Ba, Sr) TiO3 thin films
The influence of precursor chemistry and deposition process conditions on the morphology
of CSD-prepared (Ba, Sr) TiO3 thin films was investigated. By controlling the film formation …
of CSD-prepared (Ba, Sr) TiO3 thin films was investigated. By controlling the film formation …
Lanthanide-assisted deposition of strongly electro-optic PZT thin films on silicon: toward integrated active nanophotonic devices
The electro-optical properties of lead zirconate titanate (PZT) thin films depend strongly on
the quality and crystallographic orientation of the thin films. We demonstrate a novel method …
the quality and crystallographic orientation of the thin films. We demonstrate a novel method …
Control of leakage conduction of high-fatigue-endurance film ferroelectric capacitors with electrodes
Leakage conduction of (Pb, La)(Zr, Ti) O 3 (PLZT) films grown on Pt bottom electrode, with Pt
and Pt/SrRuO 3 (Pt/SRO) top electrodes is studied. It is found that the conduction behavior of …
and Pt/SrRuO 3 (Pt/SRO) top electrodes is studied. It is found that the conduction behavior of …